Inventor · disambiguated record
Paul M. Hagelin
Also filed as: HAGELIN PAUL M · HAGELIN PAUL MERRITT
92 granted patents·16 pending applications·1,080 citations·filing 1999–2024
99Inventor score
Top patents by PatentIndex Score
108 records- 0198US9705470B1Temperature-engineered MEMS resonatorSITIME CORP·Filed 2015·Granted Jul 11, 2017·28 cites·15 claims
- 0298US7369004B2Microelectromechanical oscillator and method of operating sameSITIME CORP·Filed 2006·Granted May 6, 2008·38 cites·30 claims
- 0397US11731869B1MEMS with small-molecule barricadeSITIME CORP·Filed 2021·Granted Aug 22, 2023·2 cites·25 claims
- 0497US10676349B1MEMS resonatorSITIME CORP·Filed 2017·Granted Jun 9, 2020·18 cites·22 claims
- 0597US10263596B2Temperature-engineered MEMS resonatorSiTime Coporation·Filed 2017·Granted Apr 16, 2019·17 cites·21 claims
- 0697US9712128B2Microelectromechanical resonatorSiTime Coporation·Filed 2016·Granted Jul 18, 2017·20 cites·10 claims
- 0796US11724934B2MEMS resonatorSITIME CORP·Filed 2022·Granted Aug 15, 2023·1 cites·20 claims
- 0896US11609136B2Frequency-modulating sensor arraySITIME CORP·Filed 2022·Granted Mar 21, 2023·3 cites·20 claims
- 0996US10476477B1Dual-resonator semiconductor dieSITIME CORP·Filed 2017·Granted Nov 12, 2019·8 cites·20 claims
- 1096US10218333B2Microelectromechanical resonatorSiTime Coporation·Filed 2017·Granted Feb 26, 2019·10 cites·20 claims
- 1196US8916407B1MEMS device and method of manufacturing sameSITIME CORP·Filed 2013·Granted Dec 23, 2014·16 cites·20 claims
- 1296US7369003B2Oscillator system having a plurality of microelectromechanical resonators and method of designing, controlling or operating the sameSITIME CORP·Filed 2006·Granted May 6, 2008·37 cites·36 claims
- 1396US6283601B1Optical mirror system with multi-axis rotational controlSPEED CORP C·Filed 2000·Granted Sep 4, 2001·94 cites·6 claims
- 1495US11082024B1Temperature stable mems resonatorSiTime Coporation·Filed 2019·Granted Aug 3, 2021·5 cites·20 claims
- 1595US9022644B1Micromachined thermistor and temperature measurement circuitry, and method of manufacturing and operating sameARFT CARL·Filed 2012·Granted May 5, 2015·25 cites·20 claims
- 1695US8234774B2Method for fabricating a microelectromechanical system (MEMS) resonatorHAGELIN PAUL MERRITT·Filed 2007·Granted Aug 7, 2012·31 cites·24 claims
- 1794US11677379B2Microelectromechanical resonatorSiTime Coporation·Filed 2021·Granted Jun 13, 2023·2 cites·20 claims
- 1894US11320329B2Frequency-modulating sensor arraySITIME CORP·Filed 2017·Granted May 3, 2022·6 cites·21 claims
- 1994US10892733B2Piezo-actuated MEMS resonator with surface electrodesSiTime Coporation·Filed 2018·Granted Jan 12, 2021·7 cites·25 claims
- 2094US10696547B2MEMS cavity with non-contaminating sealSITIME CORP·Filed 2018·Granted Jun 30, 2020·5 cites·21 claims
- 2194US9677948B1MEMS device with micromachined thermistorSITIME CORP·Filed 2015·Granted Jun 13, 2017·11 cites·21 claims
- 2293US11718518B1MEMS with small-molecule barricadeSITIME CORP·Filed 2020·Granted Aug 8, 2023·2 cites·22 claims
- 2393US11228298B2Microelectromechanical resonatorSiTime Coporation·Filed 2019·Granted Jan 18, 2022·5 cites·10 claims
- 2493US9774313B1Laterally-doped MEMS resonatorSITIME CORP·Filed 2014·Granted Sep 26, 2017·9 cites·10 claims
- 2592US11584642B1MEMS resonatorSITIME CORP·Filed 2020·Granted Feb 21, 2023·2 cites·24 claims
- 2692US11218984B1Fixed-beacon time transfer systemSITIME CORP·Filed 2019·Granted Jan 4, 2022·6 cites·18 claims
- 2792US7443258B2Oscillator system having a plurality of microelectromechanical resonators and method of designing, controlling or operating sameSITIME CORP·Filed 2006·Granted Oct 28, 2008·30 cites·40 claims
- 2892US7088222B1Ruggedized illuminating, marking, or signaling device and systemPOWERFLARE CORP·Filed 2003·Granted Aug 8, 2006·119 cites·49 claims
- 2991US11909376B2Piezo-actuated MEMS resonatorSiTime Coporation·Filed 2020·Granted Feb 20, 2024·2 cites·25 claims
- 3091USD669805SIlluminated signaling deviceEDWARDS TROY J·Filed 2012·Granted Oct 30, 2012·19 cites·1 claims
- 3191US7106179B1Deployment system for ruggedized illuminating, marking, or signaling devicePOWERFLARE CORP·Filed 2003·Granted Sep 12, 2006·49 cites·24 claims
- 3291US2025239984A1Piezo-actuated MEMSSITIME CORP·Filed 2024·Application pending·0 cites
- 3390US11897757B1MEMS resonator with beam segments having predefined angular offset to each other and to resonator silicon crystal orientationSITIME CORP·Filed 2021·Granted Feb 13, 2024·1 cites·23 claims
- 3490US9695036B1Temperature insensitive resonant elements and oscillators and methods of designing and manufacturing sameSITIME CORP·Filed 2013·Granted Jul 4, 2017·8 cites·9 claims
- 3590US2025236513A1MEMS cavity with non-contaminating sealSITIME CORP·Filed 2024·Application pending·0 cites
- 3689US10458858B1Micromachined thermistorSITIME CORP·Filed 2018·Granted Oct 29, 2019·5 cites·20 claims
- 3789US10192850B1Bonding process with inhibited oxide formationSITIME CORP·Filed 2017·Granted Jan 29, 2019·4 cites·18 claims
- 3889USD515958SIlluminated signaling devicePOWERFLARE CORP·Filed 2005·Granted Feb 28, 2006·37 cites·1 claims
- 3989USD515957SIlluminated signaling devicePOWERFLARE CORP·Filed 2003·Granted Feb 28, 2006·39 cites·1 claims
- 4088US12166464B2Piezo-actuated MEMS resonator with reduced nonlinear tcfSiTime Coporation·Filed 2024·Granted Dec 10, 2024·0 cites·20 claims
- 4188US11975965B2MEMS resonatorSITIME CORP·Filed 2023·Granted May 7, 2024·0 cites·20 claims
- 4288US9948273B1Temperature stable MEMS resonatorSiTime Coporation·Filed 2016·Granted Apr 17, 2018·3 cites·18 claims
- 4388US7545239B2Serrated MEMS resonatorsSITIME INC·Filed 2006·Granted Jun 9, 2009·18 cites·22 claims
- 4488USD560533SIlluminated signaling devicePOWERFLARE CORP·Filed 2005·Granted Jan 29, 2008·41 cites·1 claims
- 4588US2025237563A1Frequency-modulating sensor arraySITIME CORP·Filed 2024·Application pending·0 cites
- 4687US12351452B1MEMS with small-molecule barricadeSITIME CORP·Filed 2023·Granted Jul 8, 2025·0 cites·20 claims
- 4787US12216016B2Frequency-modulating sensor arraySITIME CORP·Filed 2024·Granted Feb 4, 2025·0 cites·20 claims
- 4887US12187606B2MEMS cavity with non-contaminating sealSITIME CORP·Filed 2023·Granted Jan 7, 2025·0 cites·20 claims
- 4987US11469734B1Temperature stable MEMS resonatorSiTime Coporation·Filed 2021·Granted Oct 11, 2022·1 cites·27 claims
- 5087US2025239989A1Microelectromechanical resonatorSiTime Coporation·Filed 2024·Application pending·0 cites
Showing the top 50 of 108 patent records by PatentIndex Score.
Join the waitlist — get patent alerts
Get an alert when Paul M. Hagelin files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →