Inventor · disambiguated record
Patrick Klingbeil
Also filed as: KLINGBEIL PATRICK
0 granted patents·3 pending applications·0 citations·filing 2005–2006
Top patents by PatentIndex Score
3 records- 0135US2006257794A1Method for transferring structures from a photomask into a photoresist layerVOELKEL LARS·Filed 2006·Application pending·0 cites
- 0229US2006290919A1Method for testing the generation of scattered light by photolithographic imaging devicesJAHNKE ANDREAS·Filed 2006·Application pending·0 cites
- 0312US2006243300A1Method for cleaning lithographic apparatusKLINGBEIL PATRICK·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →