Inventor · disambiguated record
Paul D. Lucas
Also filed as: LUCAS PAUL · LUCAS PAUL D
14 granted patents·1 pending application·287 citations·filing 1996–2020
92Inventor score
Top patents by PatentIndex Score
15 records- 0195US6568274B1Capacitive based pressure sensor designMKS INSTR INC·Filed 2000·Granted May 27, 2003·104 cites·29 claims
- 0292US6776394B2Pendulum valve assemblyMKS INSTR INC·Filed 2002·Granted Aug 17, 2004·47 cites·24 claims
- 0383US9133960B2Fluid control valvesMKS INSTR INC·Filed 2013·Granted Sep 15, 2015·7 cites·19 claims
- 0483US5804717AMass flow transducer having extended flow rate measurement rangeMKS INSTR INC·Filed 1996·Granted Sep 8, 1998·56 cites·17 claims
- 0579US7278444B2Valve assembly having improved pump-down performanceMKS INSTR INC·Filed 2005·Granted Oct 9, 2007·11 cites·21 claims
- 0668US6863256B2Seal ring for pendulum valve assemblyMKS INSTR INC·Filed 2003·Granted Mar 8, 2005·14 cites·20 claims
- 0764US10458870B2Pressure sensor with real time health monitoring and compensationMKS INSTR INC·Filed 2016·Granted Oct 29, 2019·1 cites·9 claims
- 0862US5824894AMass flowmeter and laminar flow elements for use thereinMKS INSTR INC·Filed 1997·Granted Oct 20, 1998·32 cites·28 claims
- 0959US8887575B2Pressure sensorMKS INSTR INC·Filed 2012·Granted Nov 18, 2014·2 cites·19 claims
- 1058US7369920B2Pressure control system with optimized performanceMKS INSTR INC·Filed 2006·Granted May 6, 2008·5 cites·13 claims
- 1154US9562820B2Pressure sensor with real time health monitoring and compensationMKS INSTR INC·Filed 2013·Granted Feb 7, 2017·1 cites·12 claims
- 1249US11287342B2Capacitance manometer with improved baffle for improved detection accuracyMKS INSTR INC·Filed 2020·Granted Mar 29, 2022·0 cites·20 claims
- 1349US8763987B2Butterfly valve and system employing same and method for using same fieldPISERA JAROSLAW W·Filed 2009·Granted Jul 1, 2014·2 cites·16 claims
- 1445US7032882B2Valve assembly having novel flow characteristicsMKS INSTR INC·Filed 2003·Granted Apr 25, 2006·5 cites·22 claims
- 1531US2013025786A1Systems for and methods of controlling time-multiplexed deep reactive-ion etching processesDAVIDKOVICH VLADISLAV·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →