Inventor · disambiguated record
Paul Lustiber
Also filed as: LUSTIBER PAUL · LUSTIBER PAUL E
3 granted patents·84 citations·filing 1998–2004
73Inventor score
Technology areasH10P
Top patents by PatentIndex Score
3 records- 0187US6855916B1Wafer temperature trajectory control method for high temperature ramp rate applications using dynamic predictive thermal modelingAXCELIS TECH INC·Filed 2003·Granted Feb 15, 2005·55 cites·24 claims
- 0260US5959305AMethod and apparatus for monitoring charge neutralization operationEATON CORP·Filed 1998·Granted Sep 28, 1999·25 cites·27 claims
- 0346US7205231B2Method for in-situ uniformity optimization in a rapid thermal processing systemAXCELIS TECH INC·Filed 2004·Granted Apr 17, 2007·4 cites·16 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →