Inventor · disambiguated record
Paul D. Mumbauer
Also filed as: MUMBAUER PAUL D
4 granted patents·2 pending applications·65 citations·filing 2000–2006
76Inventor score
Top patents by PatentIndex Score
6 records- 0190US6428847B1Vortex based CVD reactorPRIMAXX INC·Filed 2000·Granted Aug 6, 2002·44 cites·18 claims
- 0262US7771563B2Systems and methods for achieving isothermal batch processing of substrates used for the production of micro-electro-mechanical-systemsSUMITOMO PRECISION PROD CO·Filed 2004·Granted Aug 10, 2010·9 cites·24 claims
- 0359US7431853B2Selective etching of oxides from substratesPRIMAXX INC·Filed 2006·Granted Oct 7, 2008·1 cites·21 claims
- 0459US6391804B1Method and apparatus for uniform direct radiant heating in a rapid thermal processing reactorPRIMAXX INC·Filed 2000·Granted May 21, 2002·11 cites·11 claims
- 0543US2002195055A1Vortex based CVD reactorFiled 2002·Application pending·0 cites
- 0639US2004028810A1Chemical vapor deposition reactor and method for utilizing vapor vortexPRIMAXX INC·Filed 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →