Inventor · disambiguated record
Paul W. Pastel
Also filed as: PASTEL PAUL W · PASTEL PAUL WILIAM
9 granted patents·1 pending application·189 citations·filing 1993–2008
89Inventor score
Top patents by PatentIndex Score
10 records- 0182US5981148AMethod for forming sidewall spacers using frequency doubling hybrid resist and device formed therebyIBM·Filed 1997·Granted Nov 9, 1999·49 cites·27 claims
- 0280US5498313ASymmetrical etching ring with gas controlIBM·Filed 1993·Granted Mar 12, 1996·41 cites·3 claims
- 0373US5976768AMethod for forming sidewall spacers using frequency doubling hybrid resist and device formed therebyIBM·Filed 1998·Granted Nov 2, 1999·31 cites·7 claims
- 0469US6403393B1Device having integrated optical and copper conductors and method of fabricating sameIBM·Filed 1999·Granted Jun 11, 2002·34 cites·9 claims
- 0564US6420274B1Method for conditioning process chambersIBM·Filed 2000·Granted Jul 16, 2002·6 cites·6 claims
- 0653US8198103B2Addition of ballast hydrocarbon gas to doped polysilicon etch masked by resistDALTON TIMOTHY J·Filed 2008·Granted Jun 12, 2012·0 cites·14 claims
- 0751US6197656B1Method of forming planar isolation and substrate contacts in SIMOX-SOI.IBM·Filed 1998·Granted Mar 6, 2001·17 cites·30 claims
- 0847US2006166416A1Addition of ballast hydrocarbon gas to doped polysilicon etch masked by resistIBM·Filed 2005·Application pending·0 cites
- 0938US6387596B2Method of forming resist images by periodic pattern removalIBM·Filed 1999·Granted May 14, 2002·5 cites·20 claims
- 1036US6015745AMethod for semiconductor fabricationIBM·Filed 1998·Granted Jan 18, 2000·6 cites·6 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →