Inventor · disambiguated record
Paul J. Rubel
Also filed as: RUBEL PAUL · RUBEL PAUL J · RUBEL PAUL JOHN
27 granted patents·7 pending applications·344 citations·filing 2001–2019
96Inventor score
Files withINNOVATIVE MICRO TECHNOLOGY21INNOVATIVE MICRO TECH6OPTICAL COATING LABORATORY INC2RUBEL PAUL J2BEATON STEPHEN R1
Top patents by PatentIndex Score
34 records- 0197US7220594B2Method and apparatus for sorting particles with a MEMS deviceINNOVATIVE MICRO TECHNOLOGY·Filed 2005·Granted May 22, 2007·76 cites·20 claims
- 0294US7210352B2MEMS teeter-totter apparatus with curved beam and method of manufactureINNOVATIVE MICRO TECHNOLOGY·Filed 2005·Granted May 1, 2007·33 cites·20 claims
- 0393US7229838B2MEMS actuator and method of manufacture for MEMS particle sorting deviceINNOVATIVE MICRO TECHNOLOGY·Filed 2005·Granted Jun 12, 2007·47 cites·24 claims
- 0492US7548145B2Hysteretic MEMS thermal device and method of manufactureINNOVATIVE MICRO TECHNOLOGY·Filed 2006·Granted Jun 16, 2009·19 cites·25 claims
- 0590US7528691B2Dual substrate electrostatic MEMS switch with hermetic seal and method of manufactureINNOVATIVE MICRO TECHNOLOGY·Filed 2005·Granted May 5, 2009·32 cites·20 claims
- 0687US8608700B2Microfabicated electromagnetic actuator with push-pull motionRUBEL PAUL J·Filed 2011·Granted Dec 17, 2013·9 cites·16 claims
- 0787US7141080B2Method and apparatus for assembling an array of micro-devicesINNOVATIVE MICRO TECHNOLOGY·Filed 2005·Granted Nov 28, 2006·11 cites·19 claims
- 0886US7675162B2Interconnect structure using through wafer vias and method of fabricationINNOVATIVE MICRO TECHNOLOGY·Filed 2006·Granted Mar 9, 2010·17 cites·24 claims
- 0982US7785913B2System and method for forming moveable features on a composite substrateINNOVATIVE MICRO TECHNOLOGY·Filed 2006·Granted Aug 31, 2010·11 cites·10 claims
- 1081US11305982B2Eight spring dual substrate MEMS plate switch and method of manufactureINNOVATIVE MICRO TECH·Filed 2019·Granted Apr 19, 2022·2 cites·18 claims
- 1181US10011478B2Thermocompression bonding with raised featureINNOVATIVE MICRO TECH·Filed 2017·Granted Jul 3, 2018·1 cites·10 claims
- 1279US6785038B2Optical cross-connect with magnetic micro-electro-mechanical actuator cellsOPTICAL COATING LABORATORY INC·Filed 2001·Granted Aug 31, 2004·22 cites·24 claims
- 1373US7724121B2Singly attached MEMS thermal device and method of manufactureINNOVATIVE MICRO TECHNOLOGY·Filed 2006·Granted May 25, 2010·6 cites·20 claims
- 1472US6812061B1Method and apparatus for assembling an array of micro-devicesINNOVATIVE MICRO TECHNOLOGY·Filed 2001·Granted Nov 2, 2004·14 cites·15 claims
- 1569US9953787B2Dual substrate electrostatic MEMS switch with multiple hinges and method of manufactureINNOVATIVE MICRO TECH·Filed 2016·Granted Apr 24, 2018·1 cites·11 claims
- 1669US8690830B2In-plane electromagnetic MEMS pumpCARLSON GREGORY A·Filed 2010·Granted Apr 8, 2014·3 cites·27 claims
- 1766US7057245B2Method and apparatus for assembling an array of micro-devicesINNOVATIVE MICRO TECHNOLOGY·Filed 2004·Granted Jun 6, 2006·10 cites·16 claims
- 1865US6831380B2Low inertia latching microactuatorINNOVATIVE MICRO TECHNOLOGY·Filed 2001·Granted Dec 14, 2004·14 cites·24 claims
- 1960US8808256B2Eye drug delivery systemBEATON STEPHEN R·Filed 2012·Granted Aug 19, 2014·4 cites·9 claims
- 2060US7944113B2Hysteretic MEMS thermal device and method of manufactureINNOVATIVE MICRO TECHNOLOGY·Filed 2009·Granted May 17, 2011·2 cites·14 claims
- 2160US6801681B2Optical switch with low-inertia micromirrorOPTICAL COATING LABORATORY INC·Filed 2001·Granted Oct 5, 2004·7 cites·23 claims
- 2258US7276991B2Multiple switch MEMS structure and method of manufactureINNOVATIVE MICRO TECHNOLOGY·Filed 2005·Granted Oct 2, 2007·2 cites·20 claims
- 2354US8264307B2Dual substrate MEMS plate switch and method of manufactureFOSTER JOHN S·Filed 2011·Granted Sep 11, 2012·1 cites·22 claims
- 2451US7759152B2MEMS thermal actuator and method of manufactureINNOVATIVE MICRO TECHNOLOGY·Filed 2009·Granted Jul 20, 2010·0 cites·11 claims
- 2549US8245391B2Method of manufacturing a hysteretic MEMS two-dimensional thermal deviceRUBEL PAUL J·Filed 2009·Granted Aug 21, 2012·0 cites·19 claims
- 2649US7626311B2Hysteretic MEMS two-dimensional thermal device and method of manufactureINNOVATIVE MICRO TECHNOLOGY·Filed 2007·Granted Dec 1, 2009·0 cites·11 claims
- 2749US2006278942A1Antistiction MEMS substrate and method of manufactureINNOVATIVE MICRO TECHNOLOGY·Filed 2005·Application pending·0 cites
- 2848US7622783B2MEMS thermal actuator and method of manufactureINNOVATIVE MICRO TECHNOLOGY·Filed 2007·Granted Nov 24, 2009·0 cites·16 claims
- 2945US2019333728A1Shielded dual substrate mems plate switch and method of manufactureINNOVATIVE MICRO TECH·Filed 2019·Application pending·0 cites
- 3043US2006266692A1Microfabricated cross flow filter and method of manufactureINNOVATIVE MICRO TECHNOLOGY·Filed 2005·Application pending·0 cites
- 3142US2008250785A1Micromechanical device with gold alloy contacts and method of manufactureINNOVATIVE MICRO TECHNOLOGY·Filed 2007·Application pending·0 cites
- 3241US2007096860A1Compact MEMS thermal device and method of manufactureINNOVATIVE MICRO TECHNOLOGY·Filed 2005·Application pending·0 cites
- 3338US2017062165A1Device with separation limiting standoffINNOVATIVE MICRO TECH·Filed 2016·Application pending·0 cites
- 3437US2016343684A1Thermocompression bonding with raised featureINNOVATIVE MICRO TECH·Filed 2016·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Paul J. Rubel files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →