Inventor · disambiguated record
Pei-Fen Chou
Also filed as: CHOU PEI-FEN
4 granted patents·1 pending application·27 citations·filing 1995–2003
72Inventor score
Top patents by PatentIndex Score
5 records- 0152US6780783B2Method of wet etching low dielectric constant materialsTAIWAN SEMICONDUCTOR MFG·Filed 2001·Granted Aug 24, 2004·4 cites·14 claims
- 0251US6602560B2Method for removing residual fluorine in HDP-CVD chamberTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Aug 5, 2003·2 cites·16 claims
- 0350US5624867ALow temperature formation of palladium silicided shallow junctions using implant through metal/silicide technologyNAT SCIENCE COUNCIL·Filed 1995·Granted Apr 29, 1997·17 cites·20 claims
- 0445US6890772B2Method and apparatus for determining two dimensional doping profiles with SIMSTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted May 10, 2005·4 cites·19 claims
- 0537US2005009367A1Novel method to increase fluorine stability to improve gap fill ability and reduce k value of fluorine silicate glass (FSG) filmTAIWAN SEMICONDUCTOR MFG·Filed 2003·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Pei-Fen Chou files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →