Inventor · disambiguated record
Peter Kuecher
Also filed as: KUECHER PETER · KUEECHER PETER
4 granted patents·173 citations·filing 1987–1992
80Inventor score
Files withSIEMENS AG4
Top patents by PatentIndex Score
4 records- 0182US5478780AMethod and apparatus for producing conductive layers or structures for VLSI circuitsSIEMENS AG·Filed 1992·Granted Dec 26, 1995·57 cites·3 claims
- 0280US4924295AIntegrated semi-conductor circuit comprising at least two metallization levels composed of aluminum or aluminum compounds and a method for the manufacture of sameSIEMENS AG·Filed 1987·Granted May 8, 1990·66 cites·13 claims
- 0369US4910580AMethod for manufacturing a low-impedance, planar metallization composed of aluminum or of an aluminum alloySIEMENS AG·Filed 1988·Granted Mar 20, 1990·46 cites·4 claims
- 0424US5396184AMethod for the in situ identification of the sheet resistivity or, respectively, of process parameters of thin, electrically conductive layers manufactured under the influence of a plasmaSIEMENS AG·Filed 1992·Granted Mar 7, 1995·4 cites·11 claims
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