Inventor · disambiguated record
Peter Zupan
Also filed as: ZUPAN PETER · ZUPAN PETER F
5 granted patents·1 pending application·22 citations·filing 1992–2018
76Inventor score
Top patents by PatentIndex Score
6 records- 0184US9601363B2Thin substrate electrostatic chuck system and methodINFINEON TECHNOLOGIES AG·Filed 2015·Granted Mar 21, 2017·5 cites·18 claims
- 0277US11195695B2Ion implantation method, ion implantation apparatus and semiconductor deviceINFINEON TECHNOLOGIES AG·Filed 2018·Granted Dec 7, 2021·2 cites·13 claims
- 0372US9030797B2Thin substrate electrostatic chuck system and methodWILTSCHE EWALD·Filed 2012·Granted May 12, 2015·4 cites·34 claims
- 0452US10096507B2Thin substrate electrostatic chuck system and methodINFINEON TECHNOLOGIES AG·Filed 2017·Granted Oct 9, 2018·0 cites·30 claims
- 0542US5297858ASafety coupler-air brake interlockWABASH NATIONAL CORP·Filed 1992·Granted Mar 29, 1994·11 cites·5 claims
- 0631US2016322198A1Ion Source for Metal Implantation and Methods ThereofINFINEON TECHNOLOGIES AG·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →