Inventor · disambiguated record

Poul Gregersen

Also filed as: GREGERSEN POUL

1 granted patent·0 citations·filing 2012–2012

1Inventor score

Technology areasG05B

Files withBÜCHMANN BO1

Top patents by PatentIndex Score

1 record

0122US9836031B2Method of controlling a production process using prediction model output directly linking interacted probe radiation information with morphological process step control parametersBÜCHMANN BO·Filed 2012·Granted Dec 5, 2017·0 cites·17 claims

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