Inventor · disambiguated record

Po-Lung Hung

Also filed as: HUNG PO-LUNG

2 granted patents·2 pending applications·0 citations·filing 2021–2024

27Inventor score

Technology areasH10P

Files withTAIWAN SEMICONDUCTOR MFG CO LTD4

Top patents by PatentIndex Score

4 records

0170US2024387152A1Dry etcher uniformity control by tuning edge zone plasma sheathTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
0270US2024379387A1Small gas flow monitoring of dry etcher by oes signalTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
0363US12334314B2Dry etcher uniformity control by tuning edge zone plasma sheathTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Jun 17, 2025·0 cites·20 claims
0460US12142494B2Small gas flow monitoring of dry etcher by OES signalTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Nov 12, 2024·0 cites·20 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →