Inventor · disambiguated record
Pyung-Yong Um
Also filed as: UM PYUNG-YONG
5 granted patents·5 pending applications·16 citations·filing 2001–2014
71Inventor score
Top patents by PatentIndex Score
10 records- 0188US9493875B2Shower head unit and chemical vapor deposition apparatusEUGENE TECHNOLOGY CO LTD·Filed 2014·Granted Nov 15, 2016·8 cites·18 claims
- 0269US8585823B2CVD apparatus having a rotating heaterUM PYUNG-YONG·Filed 2006·Granted Nov 19, 2013·6 cites·12 claims
- 0349US8030597B2Partition-type heating apparatusEUGENE TECHNOLOGY CO LTD·Filed 2006·Granted Oct 4, 2011·0 cites·14 claims
- 0443US7326438B2Method for depositing nitride film using chemical vapor deposition apparatus of single chamber typeEUGENE TECHNOLOGY CO LTD·Filed 2003·Granted Feb 5, 2008·2 cites·5 claims
- 0542US2010243165A1Apparatus for surface-treating wafer using high-frequency inductively-coupled plasmaUM PYUNG-YONG·Filed 2007·Application pending·0 cites
- 0641US2009159001A1Shower head of chemical vapor deposition apparatusUM PYUNG-YONG·Filed 2005·Application pending·0 cites
- 0738US8876976B2Chemical vapor deposition apparatus for equalizing heating temperatureUM PYUNG-YONG·Filed 2007·Granted Nov 4, 2014·0 cites·8 claims
- 0838US2010035417A1Method of fabricating polycrystalline silicon thin filmEUGENE TECHNOLOGY CO LTD·Filed 2006·Application pending·0 cites
- 0933US2005054198A1Apparatus of chemical vapor depositionFiled 2001·Application pending·0 cites
- 1029US2006144336A1Heater of chemical vapor deposition apparatus for manfuacturing a thin filmUM PYUNG YONG·Filed 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →