Inventor · disambiguated record
Qingsu Wang
Also filed as: WANG QINGSU
14 granted patents·1,040 citations·filing 1995–2001
95Inventor score
Files withADVANCED MICRO DEVICES INC14
Top patents by PatentIndex Score
14 records- 0195US5859964ASystem and method for performing real time data acquisition, process modeling and fault detection of wafer fabrication processesADVANCED MICRO DEVICES INC·Filed 1996·Granted Jan 12, 1999·423 cites·36 claims
- 0295US5740429AE10 reporting toolADVANCED MICRO DEVICES INC·Filed 1995·Granted Apr 14, 1998·168 cites·33 claims
- 0392US6725402B1Method and apparatus for fault detection of a processing tool and control thereof using an advanced process control (APC) frameworkADVANCED MICRO DEVICES INC·Filed 2000·Granted Apr 20, 2004·78 cites·17 claims
- 0491US6532555B1Method and apparatus for integration of real-time tool data and in-line metrology for fault detection in an advanced process control (APC) frameworkADVANCED MICRO DEVICES INC·Filed 1999·Granted Mar 11, 2003·78 cites·21 claims
- 0588US6546508B1Method and apparatus for fault detection of a processing tool in an advanced process control (APC) frameworkADVANCED MICRO DEVICES INC·Filed 1999·Granted Apr 8, 2003·61 cites·23 claims
- 0682US6629012B1Wafer-less qualification of a processing toolADVANCED MICRO DEVICES INC·Filed 2000·Granted Sep 30, 2003·29 cites·34 claims
- 0778US6268270B1Lot-to-lot rapid thermal processing (RTP) chamber preheat optimizationADVANCED MICRO DEVICES INC·Filed 1999·Granted Jul 31, 2001·57 cites·25 claims
- 0877US5914879ASystem and method for calculating cluster tool performance metrics using a weighted configuration matrixADVANCED MICRO DEVICES INC·Filed 1997·Granted Jun 22, 1999·74 cites·32 claims
- 0975US6697691B1Method and apparatus for fault model analysis in manufacturing toolsADVANCED MICRO DEVICES INC·Filed 2000·Granted Feb 24, 2004·18 cites·42 claims
- 1060US6556959B1Method and apparatus for updating a manufacturing model based upon fault data relating to processing of semiconductor wafersADVANCED MICRO DEVICES INC·Filed 1999·Granted Apr 29, 2003·25 cites·32 claims
- 1158US6324341B1Lot-to-lot rapid thermal processing (RTP) chamber preheat optimizationADVANCED MICRO DEVICES INC·Filed 2000·Granted Nov 27, 2001·6 cites·20 claims
- 1257US6968303B1Automated system for extracting and combining tool trace data and wafer electrical test (WET) data for semiconductor processingADVANCED MICRO DEVICES INC·Filed 2000·Granted Nov 22, 2005·7 cites·40 claims
- 1351US6738731B1Method and apparatus for using tool state information to identify faulty wafersADVANCED MICRO DEVICES INC·Filed 2001·Granted May 18, 2004·6 cites·29 claims
- 1444US6556882B1Method and apparatus for generating real-time data from static filesADVANCED MICRO DEVICES INC·Filed 1999·Granted Apr 29, 2003·10 cites·30 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →