Inventor · disambiguated record
Qun Ying Lin
Also filed as: LIN QUN Y · LIN QUN YING
8 granted patents·2 pending applications·27 citations·filing 1996–2012
82Inventor score
Top patents by PatentIndex Score
10 records- 0179US8741511B1Determination of lithography tool process conditionGLOBALFOUNDRIES SG PTE LTD·Filed 2012·Granted Jun 3, 2014·4 cites·21 claims
- 0274US7655388B2Mask and method to pattern chromeless phase lithography contact holeCHARTERED SEMICONDUCTOR MFG·Filed 2005·Granted Feb 2, 2010·4 cites·36 claims
- 0373US7014962B2Half tone alternating phase shift masksCHARTERED SEMICONDUCTOR MFG·Filed 2003·Granted Mar 21, 2006·13 cites·57 claims
- 0472US8057968B2Mask and method to pattern chromeless phase lithography contact holeTAN SIA KIM·Filed 2010·Granted Nov 15, 2011·2 cites·25 claims
- 0550US9034720B2Litho scanner alignment signal improvementLIU HUI·Filed 2012·Granted May 19, 2015·0 cites·17 claims
- 0648US7866224B2Monitoring structureCHARTERED SEMICONDUCTOR MFG·Filed 2006·Granted Jan 11, 2011·0 cites·11 claims
- 0747US7288366B2Method for dual damascene patterning with single exposure using tri-tone phase shift maskCHARTERED SEMICONDUCTOR MFG·Filed 2003·Granted Oct 30, 2007·2 cites·9 claims
- 0838US2006105520A1Structure and method to fabricate a protective sidewall liner for an optical maskTAN SIA K·Filed 2004·Application pending·0 cites
- 0934US2014019927A1Waferless measurement recipeKOO CHEE KIONG·Filed 2012·Application pending·0 cites
- 1030US6451706B1Attenuation of reflecting lights by surface treatmentCHARTERED SEMICONDUCTOR MFG·Filed 1996·Granted Sep 17, 2002·2 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →