Inventor · disambiguated record

Que Weiguo

Also filed as: WEIGUO QUE

2 granted patents·20 citations·filing 2006–2007

59Inventor score

Technology areasH01J H10P

Files withAXCELIS TECH INC2

Top patents by PatentIndex Score

2 records

0185US7507977B2System and method of ion beam control in response to a beam glitchAXCELIS TECH INC·Filed 2006·Granted Mar 24, 2009·10 cites·34 claims
0278US7566887B2Method of reducing particle contamination for ion implantersAXCELIS TECH INC·Filed 2007·Granted Jul 28, 2009·10 cites·38 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →