Inventor · disambiguated record
Rainer Kirchmann
Also filed as: KIRCHMANN RAINER
2 granted patents·233 citations·filing 1999–2016
61Inventor score
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2 records- 0187US6569773B1Method for anisotropic plasma-chemical dry etching of silicon nitride layers using a gas mixture containing fluorineTEMIC SEMICONDUCTOR GMBH·Filed 1999·Granted May 27, 2003·233 cites·30 claims
- 0235US10786815B2Rotor for a disintegration deviceKHD HUMBOLDT WEDAG GMBH·Filed 2016·Granted Sep 29, 2020·0 cites·7 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →