Inventor · disambiguated record
Randall L. Kubena
Also filed as: KUBENA RANDALL · KUBENA RANDALL L · KUBENA RANDALL LYNN
96 granted patents·2 pending applications·1,746 citations·filing 1986–2024
99Inventor score
Top patents by PatentIndex Score
98 records- 0198US11567147B1Phononic comb enhanced gradiometersHRL LAB LLC·Filed 2020·Granted Jan 31, 2023·9 cites·25 claims
- 0298US10389392B1High-Q quartz-based inductor array for antenna matchingHRL LAB LLC·Filed 2017·Granted Aug 20, 2019·28 cites·36 claims
- 0398US10266398B1ALD metal coatings for high Q MEMS structuresHRL LAB LLC·Filed 2014·Granted Apr 23, 2019·22 cites·22 claims
- 0497US11563420B1Femto-tesla MEMS RF antenna with integrated flux concentratorHRL LAB LLC·Filed 2020·Granted Jan 24, 2023·8 cites·20 claims
- 0597US11431293B1Noise suppression in a phononic combHRL LAB LLC·Filed 2021·Granted Aug 30, 2022·4 cites·27 claims
- 0697US11156897B2Enhanced stability oscillators using a phononic combHRL LAB LLC·Filed 2020·Granted Oct 26, 2021·8 cites·18 claims
- 0797US10110198B1Integrated quartz MEMS tuning fork resonator/oscillatorHRL LAB LLC·Filed 2015·Granted Oct 23, 2018·19 cites·9 claims
- 0897US7750535B2Quartz-based nanoresonatorHRL LAB LLC·Filed 2007·Granted Jul 6, 2010·42 cites·9 claims
- 0997US7581443B2Disc resonator gyroscopesBOEING CO·Filed 2006·Granted Sep 1, 2009·77 cites·25 claims
- 1097US7459099B2Quartz-based nanoresonators and method of fabricating sameHRL LAB LLC·Filed 2005·Granted Dec 2, 2008·55 cites·12 claims
- 1196US9250074B1Resonator assembly comprising a silicon resonator and a quartz resonatorHRL LAB LLC·Filed 2014·Granted Feb 2, 2016·18 cites·27 claims
- 1296US9046541B1Method for producing a disk resonator gyroscopeHRL LAB LLC·Filed 2012·Granted Jun 2, 2015·18 cites·15 claims
- 1396US8765615B1Quartz-based MEMS resonators and methods of fabricating sameCHANG DAVID T·Filed 2010·Granted Jul 1, 2014·32 cites·24 claims
- 1496US8151640B1MEMS on-chip inertial navigation system with error correctionKUBENA RANDALL L·Filed 2008·Granted Apr 10, 2012·50 cites·35 claims
- 1595US11239823B1Quartz MEMS piezoelectric resonator for chipscale RF antennaeHRL LAB LLC·Filed 2018·Granted Feb 1, 2022·11 cites·18 claims
- 1695US9991863B1Rounded and curved integrated tethers for quartz resonatorsHRL LAB LLC·Filed 2015·Granted Jun 5, 2018·12 cites·12 claims
- 1795US7884930B2Integrated quartz biological sensor and methodHRL LAB LLC·Filed 2008·Granted Feb 8, 2011·30 cites·21 claims
- 1895US7559130B2Method for fabricating quartz-based nanoresonatorsHRL LAB LLC·Filed 2007·Granted Jul 14, 2009·30 cites·17 claims
- 1994US10819276B1Broadband integrated RF magnetic antennaHRL LAB LLC·Filed 2019·Granted Oct 27, 2020·12 cites·21 claims
- 2094US7994877B1MEMS-based quartz hybrid filters and a method of making the sameHRL LAB LLC·Filed 2008·Granted Aug 9, 2011·25 cites·13 claims
- 2194US7802356B1Method of fabricating an ultra thin quartz resonator componentHRL LAB LLC·Filed 2008·Granted Sep 28, 2010·29 cites·11 claims
- 2294US7555824B2Method for large scale integration of quartz-based devicesHRL LAB LLC·Filed 2006·Granted Jul 7, 2009·29 cites·28 claims
- 2394US7237315B2Method for fabricating a resonatorHRL LAB LLC·Filed 2003·Granted Jul 3, 2007·53 cites·14 claims
- 2493US9879997B1Quartz resonator with plasma etched tethers for stress isolation from the mounting contactsHRL LAB LLC·Filed 2014·Granted Jan 30, 2018·16 cites·28 claims
- 2593US8994465B1Phase noise reduction control loop for oscillators using nonlinear resonator operationHRL LAB LLC·Filed 2013·Granted Mar 31, 2015·11 cites·27 claims
- 2693US8569937B1Piezoelectric resonator with capacitive sense and/or force rebalance electrodes to control an amplitude of vibrationKUBENA RANDALL L·Filed 2010·Granted Oct 29, 2013·17 cites·10 claims
- 2793US8522612B1MEMS on-chip inertial navigation system with error correctionKUBENA RANDALL L·Filed 2012·Granted Sep 3, 2013·21 cites·14 claims
- 2893US8305154B1Parametrically driven quartz UHF oscillatorKUBENA RANDALL·Filed 2010·Granted Nov 6, 2012·28 cites·18 claims
- 2993US7851971B2Low frequency quartz based MEMS resonators and method of fabricating the sameHRL LAB LLC·Filed 2009·Granted Dec 14, 2010·27 cites·4 claims
- 3092US11606098B1Comb enhanced oscillator with AM-to-PM noise suppressionHRL LAB LLC·Filed 2022·Granted Mar 14, 2023·2 cites·25 claims
- 3192US10571267B1High stability angular sensorHRL LAB LLC·Filed 2016·Granted Feb 25, 2020·7 cites·2 claims
- 3292US8766745B1Quartz-based disk resonator gyro with ultra-thin conductive outer electrodes and method of making sameKUBENA RANDALL L·Filed 2009·Granted Jul 1, 2014·21 cites·28 claims
- 3392US8176607B1Method of fabricating quartz resonatorsKUBENA RANDALL L·Filed 2009·Granted May 15, 2012·22 cites·22 claims
- 3492US6580138B1Single crystal, dual wafer, tunneling sensor or switch with silicon on insulator substrate and a method of making sameHRL LAB LLC·Filed 2000·Granted Jun 17, 2003·40 cites·41 claims
- 3591US10914585B1High dynamic range gyroscopeHRL LAB LLC·Filed 2020·Granted Feb 9, 2021·2 cites·3 claims
- 3691US10444014B1High dynamic range gyroscopeHRL LAB LLC·Filed 2016·Granted Oct 15, 2019·6 cites·19 claims
- 3791US10177737B1High-Q quartz-based inductors for high power LF communicationHRL LAB LLC·Filed 2017·Granted Jan 8, 2019·7 cites·20 claims
- 3891US7830074B2Integrated quartz oscillator on an active electronic substrateHRL LAB LLC·Filed 2007·Granted Nov 9, 2010·23 cites·19 claims
- 3991US6922118B2Micro electrical mechanical system (MEMS) tuning using focused ion beamsHRL LAB LLC·Filed 2002·Granted Jul 26, 2005·41 cites·23 claims
- 4091US5905202ATunneling rotation sensorHUGHES ELECTRONICS CORP·Filed 1997·Granted May 18, 1999·82 cites·4 claims
- 4191US4908226ASelective area nucleation and growth method for metal chemical vapor deposition using focused ion beamsHUGHES AIRCRAFT CO·Filed 1988·Granted Mar 13, 1990·77 cites·44 claims
- 4290US8593037B1Resonator with a fluid cavity thereinKUBENA RANDALL L·Filed 2012·Granted Nov 26, 2013·11 cites·4 claims
- 4389US5548129AQuantum well structure with self-aligned gate and method of making the sameHUGHES AIRCRAFT CO·Filed 1995·Granted Aug 20, 1996·70 cites·10 claims
- 4488US11988727B1Magnetostrictive MEMS magnetic gradiometerHRL LAB LLC·Filed 2020·Granted May 21, 2024·2 cites·27 claims
- 4588US9038459B1Frequency locking of resonators for improved temperature control of gyroscopesKUBENA RANDALL L·Filed 2012·Granted May 26, 2015·14 cites·24 claims
- 4688US8138016B2Large area integration of quartz resonators with electronicsCHANG DAVID T·Filed 2009·Granted Mar 20, 2012·15 cites·18 claims
- 4787US11145982B2Antenna loaded with electromechanical resonatorsHRL LAB LLC·Filed 2017·Granted Oct 12, 2021·4 cites·28 claims
- 4887US11101786B1HF-VHF quartz MEMS resonatorHRL LAB LLC·Filed 2018·Granted Aug 24, 2021·4 cites·10 claims
- 4987US7647688B1Method of fabricating a low frequency quartz resonatorHRL LAB LLC·Filed 2008·Granted Jan 19, 2010·14 cites·18 claims
- 5087US7015060B1Cloverleaf microgyroscope with through-wafer interconnects and method of manufacturing a cloverleaf microgyroscope with through-wafer interconnectsHRL LAB LLC·Filed 2004·Granted Mar 21, 2006·40 cites·19 claims
Showing the top 50 of 98 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →