Inventor · disambiguated record
Rainer Obweger
Also filed as: OBWEGER RAINER · OBWEGER RAINER HARALD
20 granted patents·2 pending applications·41 citations·filing 2002–2019
92Inventor score
Top patents by PatentIndex Score
22 records- 0187US8485204B2Closed chamber with fluid separation featureOBWEGER RAINER·Filed 2010·Granted Jul 16, 2013·9 cites·13 claims
- 0280US8646767B2Device for holding wafer shaped articlesKUMNIG FRANZ·Filed 2010·Granted Feb 11, 2014·8 cites·15 claims
- 0377US11195730B2Method and apparatus for processing wafer-shaped articlesLAM RES AG·Filed 2019·Granted Dec 7, 2021·2 cites·10 claims
- 0475US8791614B2Device for treating disc-like article and method for operating sameOBWEGER RAINER·Filed 2009·Granted Jul 29, 2014·5 cites·20 claims
- 0573US8490634B2Device for treating disc-like articlesOBWEGER RAINER·Filed 2010·Granted Jul 23, 2013·3 cites·16 claims
- 0670US8833380B2Device for treating disc-like articlesOBWEGER RAINER·Filed 2011·Granted Sep 16, 2014·2 cites·11 claims
- 0769US9597701B2Apparatus for treating surfaces of wafer-shaped articlesLAM RES AG·Filed 2013·Granted Mar 21, 2017·2 cites·9 claims
- 0866US8709165B2Method and apparatus for surface treatment using inorganic acid and ozoneOKORN-SCHMIDT HARALD·Filed 2010·Granted Apr 29, 2014·2 cites·7 claims
- 0961US10490426B2Method and apparatus for processing wafer-shaped articlesLAM RES AG·Filed 2014·Granted Nov 26, 2019·1 cites·29 claims
- 1061US10269615B2Apparatus for treating surfaces of wafer-shaped articlesTSCHINDERLE ULRICH·Filed 2011·Granted Apr 23, 2019·1 cites·20 claims
- 1160US8974631B2Device for fluid treating plate-like articlesOBWEGER RAINER·Filed 2007·Granted Mar 10, 2015·1 cites·16 claims
- 1258US9633890B2Device for treating surfaces of wafer-shaped articles and gripping pin for use in the deviceTSCHINDERLE ULRICH·Filed 2011·Granted Apr 25, 2017·1 cites·18 claims
- 1352US7052577B2Annular receptacle for a rotating carrierSEZ AG·Filed 2002·Granted May 30, 2006·4 cites·14 claims
- 1451US9653328B2Method and apparatus for surface treatment using inorganic acid and ozoneOKORN-SCHMIDT HARALD·Filed 2014·Granted May 16, 2017·0 cites·14 claims
- 1549US10056287B2Apparatus for treating surfaces of wafer-shaped articlesLAM RES AG·Filed 2015·Granted Aug 21, 2018·0 cites·19 claims
- 1648US2013233356A1Process and apparatus for treating surfaces of wafer-shaped articlesOBWEGER RAINER·Filed 2012·Application pending·0 cites
- 1747US10043686B2Apparatus for treating surfaces of wafer-shaped articlesLAM RES AG·Filed 2013·Granted Aug 7, 2018·0 cites·7 claims
- 1847US8435356B2Device and method for wet treating disc-like substratesOBWEGER RAINER·Filed 2012·Granted May 7, 2013·0 cites·8 claims
- 1946US9960057B2Device for measuring the distribution or impulse of a series of dropletsLAM RES AG·Filed 2014·Granted May 1, 2018·0 cites·3 claims
- 2046US8573236B2Apparatus and method for ultrasonic wet treatment of plate-like articlesOBWEGER RAINER·Filed 2008·Granted Nov 5, 2013·0 cites·20 claims
- 2139US8261757B2Device and method for wet treating disc-like substratesOBWEGER RAINER·Filed 2004·Granted Sep 11, 2012·0 cites·25 claims
- 2235US2013101372A1Method and apparatus for processing wafer-shaped articlesTSCHINDERLE ULRICH·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →