Inventor · disambiguated record
Randy J. Shul
Also filed as: SHUL RANDY J
20 granted patents·654 citations·filing 1995–2020
96Inventor score
Files withSANDIA CORP12NAT TECH & ENG SOLUTIONS SANDIA LLC5ANDERSON ROBERT C1CHANCHANI RAJEN1XEROX CORP1
Top patents by PatentIndex Score
20 records- 0196US6432577B1Apparatus and method for fabricating a microbatterySANDIA CORP·Filed 2000·Granted Aug 13, 2002·94 cites·15 claims
- 0292US5814238AMethod for dry etching of transition metalsSANDIA CORP·Filed 1995·Granted Sep 29, 1998·191 cites·69 claims
- 0391US8236611B1Die singulation method and package formed therebyANDERSON ROBERT C·Filed 2010·Granted Aug 7, 2012·18 cites·25 claims
- 0487US7051656B1Microelectromechanical safing and arming apparatusSANDIA CORP·Filed 2003·Granted May 30, 2006·38 cites·37 claims
- 0587US6820469B1Microfabricated teeter-totter resonatorSANDIA CORP·Filed 2003·Granted Nov 23, 2004·47 cites·19 claims
- 0686US10446369B1Systems and methods for interferometric end point detection for a focused ion beam fabrication toolNAT TECH & ENG SOLUTIONS SANDIA LLC·Filed 2017·Granted Oct 15, 2019·10 cites·19 claims
- 0785US6823720B1Method for chemical sensing using a microfabricated teeter-totter resonatorSANDIA CORP·Filed 2003·Granted Nov 30, 2004·29 cites·20 claims
- 0883US8597985B1MEMS packaging with etching and thinning of lid wafer to form lids and expose device wafer bond padsCHANCHANI RAJEN·Filed 2012·Granted Dec 3, 2013·13 cites·16 claims
- 0983US7383774B1Microelectromechanical safing and arming apparatusSANDIA CORP·Filed 2006·Granted Jun 10, 2008·13 cites·10 claims
- 1082US5866925AGallium nitride junction field-effect transistorSANDIA CORP·Filed 1997·Granted Feb 2, 1999·67 cites·39 claims
- 1180US11664238B1Plasma-based method for delayering of circuitsNAT TECH & ENG SOLUTIONS SANDIA LLC·Filed 2020·Granted May 30, 2023·2 cites·9 claims
- 1276US7148436B1Microelectromechanical acceleration-sensing apparatusSANDIA CORP·Filed 2003·Granted Dec 12, 2006·23 cites·20 claims
- 1376US6472332B1Surface micromachined structure fabrication methods for a fluid ejection deviceXEROX CORP·Filed 2000·Granted Oct 29, 2002·21 cites·14 claims
- 1472US7105098B1Method to control artifacts of microstructural fabricationSANDIA CORP·Filed 2002·Granted Sep 12, 2006·16 cites·6 claims
- 1572US5624529ADry etching method for compound semiconductorsSANDIA CORP·Filed 1995·Granted Apr 29, 1997·43 cites·17 claims
- 1670US6930051B1Method to fabricate multi-level silicon-based microstructures via use of an etching delay layerSANDIA CORP·Filed 2002·Granted Aug 16, 2005·13 cites·5 claims
- 1767US6660648B1Process for manufacture of semipermeable silicon nitride membranesSANDIA CORP·Filed 2000·Granted Dec 9, 2003·15 cites·8 claims
- 1866US10262931B2Lateral vias for connections to buried microconductors and methods thereofNAT TECH & ENG SOLUTIONS SANDIA LLC·Filed 2018·Granted Apr 16, 2019·1 cites·20 claims
- 1946US9972565B1Lateral vias for connections to buried microconductorsNAT TECH & ENG SOLUTIONS SANDIA LLC·Filed 2016·Granted May 15, 2018·0 cites·18 claims
- 2043US10217704B1Method for simultaneous modification of multiple semiconductor device featuresNAT TECH & ENG SOLUTIONS SANDIA LLC·Filed 2017·Granted Feb 26, 2019·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →