Inventor · disambiguated record
Reinhold Muhl
Also filed as: MUEHL REINHOLD
5 granted patents·117 citations·filing 1983–1989
83Inventor score
Files withIBM5
Top patents by PatentIndex Score
5 records- 0177US4513203AMask and system for mutually aligning objects in ray exposure systemsIBM·Filed 1984·Granted Apr 23, 1985·19 cites·23 claims
- 0267US4816115AProcess of making via holes in a double-layer insulationIBM·Filed 1988·Granted Mar 28, 1989·41 cites·17 claims
- 0360US4980317AMethod of producing integrated semiconductor structures comprising field-effect transistors with channel lengths in the submicron range using a three-layer resist systemIBM·Filed 1989·Granted Dec 25, 1990·20 cites·18 claims
- 0457US5055383AProcess for making masks with structures in the submicron rangeIBM·Filed 1989·Granted Oct 8, 1991·24 cites·14 claims
- 0553US4489146AReverse process for making chromium masks using silicon dioxide dry etch maskIBM·Filed 1983·Granted Dec 18, 1984·13 cites·11 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →