Inventor · disambiguated record
Rhett B. Jucha
Also filed as: JUCHA RHETT B
30 granted patents·2,040 citations·filing 1984–1992
98Inventor score
Top patents by PatentIndex Score
30 records- 0199US4820377AMethod for cleanup processing chamber and vacuum process moduleTEXAS INSTRUMENTS INC·Filed 1987·Granted Apr 11, 1989·334 cites·52 claims
- 0297US4886570AProcessing apparatus and methodTEXAS INSTRUMENTS INC·Filed 1988·Granted Dec 12, 1989·160 cites·40 claims
- 0396US4828649AMethod for etching an aluminum film doped with siliconTEXAS INSTRUMENTS INC·Filed 1988·Granted May 9, 1989·176 cites·15 claims
- 0495US5138973AWafer processing apparatus having independently controllable energy sourcesTEXAS INSTRUMENTS INC·Filed 1988·Granted Aug 18, 1992·108 cites·14 claims
- 0595US4911103AProcessing apparatus and methodTEXAS INSTRUMENTS INC·Filed 1988·Granted Mar 27, 1990·167 cites·12 claims
- 0695US4867841AMethod for etch of polysilicon filmTEXAS INSTRUMENTS INC·Filed 1988·Granted Sep 19, 1989·141 cites·15 claims
- 0793US5262610ALow particulate reliability enhanced remote microwave plasma discharge deviceUS ARMY·Filed 1991·Granted Nov 16, 1993·86 cites·3 claims
- 0892US4878994AMethod for etching titanium nitride local interconnectsTEXAS INSTRUMENTS INC·Filed 1988·Granted Nov 7, 1989·124 cites·53 claims
- 0991US5248636AProcessing method using both a remotely generated plasma and an in-situ plasma with UV irradiationTEXAS INSTRUMENTS INC·Filed 1992·Granted Sep 28, 1993·86 cites·1 claims
- 1091US4838990AMethod for plasma etching tungstenTEXAS INSTRUMENTS INC·Filed 1987·Granted Jun 13, 1989·102 cites·11 claims
- 1188US4842686AWafer processing apparatus and methodTEXAS INSTRUMENTS INC·Filed 1987·Granted Jun 27, 1989·54 cites·63 claims
- 1287US4822450AProcessing apparatus and methodTEXAS INSTRUMENTS INC·Filed 1988·Granted Apr 18, 1989·56 cites·30 claims
- 1386US4659413AAutomated single slice cassette load lock plasma reactorTEXAS INSTRUMENTS INC·Filed 1984·Granted Apr 21, 1987·31 cites·35 claims
- 1485US4891087AIsolation substrate ring for plasma reactorTEXAS INSTRUMENTS INC·Filed 1987·Granted Jan 2, 1990·39 cites·11 claims
- 1582US4891488AProcessing apparatus and methodTEXAS INSTRUMENTS INC·Filed 1987·Granted Jan 2, 1990·57 cites·5 claims
- 1676US4988644AMethod for etching semiconductor materials using a remote plasma generatorTEXAS INSTRUMENTS INC·Filed 1989·Granted Jan 29, 1991·48 cites·6 claims
- 1771US4502915ATwo-step plasma process for selective anisotropic etching of polycrystalline silicon without leaving residueTEXAS INSTRUMENTS INC·Filed 1984·Granted Mar 5, 1985·30 cites·20 claims
- 1862US4915777AMethod for etching tungstenTEXAS INSTRUMENTS INC·Filed 1989·Granted Apr 10, 1990·25 cites·15 claims
- 1962US4874723ASelective etching of tungsten by remote and in situ plasma generationTEXAS INSTRUMENTS INC·Filed 1987·Granted Oct 17, 1989·27 cites·17 claims
- 2062US4849067AMethod for etching tungstenTEXAS INSTRUMENTS INC·Filed 1987·Granted Jul 18, 1989·27 cites·2 claims
- 2162US4758305AContact etch methodTEXAS INSTRUMENTS INC·Filed 1986·Granted Jul 19, 1988·29 cites·8 claims
- 2258US4997520AMethod for etching tungstenTEXAS INSTRUMENTS INC·Filed 1988·Granted Mar 5, 1991·25 cites·10 claims
- 2358US4923562AProcessing of etching refractory metalsTEXAS INSTRUMENTS INC·Filed 1988·Granted May 8, 1990·22 cites·7 claims
- 2458US4685999AApparatus for plasma assisted etchingTEXAS INSTRUMENTS INC·Filed 1985·Granted Aug 11, 1987·9 cites·20 claims
- 2557US4855016AMethod for etching aluminum film doped with copperTEXAS INSTRUMENTS INC·Filed 1988·Granted Aug 8, 1989·21 cites·24 claims
- 2654US4842676AProcess for etch of tungstenTEXAS INSTRUMENTS INC·Filed 1987·Granted Jun 27, 1989·19 cites·45 claims
- 2747US4842687AMethod for etching tungstenTEXAS INSTRUMENTS INC·Filed 1988·Granted Jun 27, 1989·14 cites·7 claims
- 2843US4838984AMethod for etching films of mercury-cadmium-telluride and zinc sulfidTEXAS INSTRUMENTS INC·Filed 1987·Granted Jun 13, 1989·11 cites·34 claims
- 2941US4863558AMethod for etching tungstenTEXAS INSTRUMENTS INC·Filed 1988·Granted Sep 5, 1989·10 cites·6 claims
- 3036US4849068AApparatus and method for plasma-assisted etchingTEXAS INSTRUMENTS INC·Filed 1988·Granted Jul 18, 1989·2 cites·24 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →