Inventor · disambiguated record
Richard J. Hertel
Also filed as: HERTEL RICHARD · HERTEL RICHARD J · HERTEL RICHARD JOHN
34 granted patents·4 pending applications·1,660 citations·filing 1982–2021
97Inventor score
Files withVARIAN ASSOCIATES11VARIAN SEMICONDUCTOR EQUIPMENT ASS INC11FAIRHURST JOHN ROBERT4ITT4VARIAN SEMICONDUCTOR EQUIPMENT3
Top patents by PatentIndex Score
38 records- 0198US5751246AAccountability and theft protection via the global positioning systemITT·Filed 1996·Granted May 12, 1998·436 cites·20 claims
- 0296US5532690AApparatus and method for monitoring and bounding the path of a ground vehicleITT·Filed 1995·Granted Jul 2, 1996·394 cites·20 claims
- 0396US4449885AWafer transfer systemVARIAN ASSOCIATES·Filed 1982·Granted May 22, 1984·183 cites·11 claims
- 0494US9706634B2Apparatus and techniques to treat substrates using directional plasma and reactive gasVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2015·Granted Jul 11, 2017·12 cites·14 claims
- 0594US4836733AWafer transfer systemVARIAN ASSOCIATES·Filed 1987·Granted Jun 6, 1989·242 cites·38 claims
- 0690US10276340B1Low particle capacitively coupled components for workpiece processingVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2017·Granted Apr 30, 2019·6 cites·18 claims
- 0789US10004133B2Apparatus and techniques to treat substrates using directional plasma and reactive gasVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2017·Granted Jun 19, 2018·5 cites·18 claims
- 0889US4634331AWafer transfer systemVARIAN ASSOCIATES·Filed 1984·Granted Jan 6, 1987·73 cites·6 claims
- 0981US10224181B2Radio frequency extraction system for charge neutralized ion beamVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2016·Granted Mar 5, 2019·3 cites·13 claims
- 1081US8585115B2Method and apparatus for lifting a horizontally-oriented substrate from a cassetteFAIRHURST JOHN ROBERT·Filed 2011·Granted Nov 19, 2013·6 cites·17 claims
- 1181US5040484AApparatus for retaining wafersVARIAN ASSOCIATES·Filed 1990·Granted Aug 20, 1991·84 cites·16 claims
- 1280US4899059ADisk scanning apparatus for batch ion implantersVARIAN ASSOCIATES·Filed 1989·Granted Feb 6, 1990·55 cites·36 claims
- 1379US9865433B1Gas injection system for ion beam deviceVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2017·Granted Jan 9, 2018·2 cites·20 claims
- 1475US4817556AApparatus for retaining wafersVARIAN ASSOCIATES·Filed 1987·Granted Apr 4, 1989·43 cites·26 claims
- 1574US7220055B2Air bearing having unitary housingVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2005·Granted May 22, 2007·7 cites·16 claims
- 1672US8563407B2Dual sided workpiece handlingHERTEL RICHARD J·Filed 2010·Granted Oct 22, 2013·4 cites·10 claims
- 1770US8746666B2Media carrierHERTEL RICHARD·Filed 2011·Granted Jun 10, 2014·4 cites·9 claims
- 1867US10128082B2Apparatus and techniques to treat substrates using directional plasma and point of use chemistryVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2015·Granted Nov 13, 2018·1 cites·11 claims
- 1966US8550520B2Method and apparatus for manipulating a substrateFAIRHURST JOHN ROBERT·Filed 2011·Granted Oct 8, 2013·2 cites·13 claims
- 2066US4498833AWafer orientation systemVARIAN ASSOCIATES·Filed 1982·Granted Feb 12, 1985·27 cites·16 claims
- 2165US8941082B2Dual sided workpiece handlingVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Granted Jan 27, 2015·0 cites·8 claims
- 2261US9218990B2Method and apparatus for holding a plurality of substrates for processingFAIRHURST JOHN ROBERT·Filed 2011·Granted Dec 22, 2015·1 cites·14 claims
- 2360US10600616B2Apparatus and techniques to treat substrates using directional plasma and point of use chemistryVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2018·Granted Mar 24, 2020·0 cites·15 claims
- 2458US12106943B2Substrate halo arrangement for improved process uniformityAPPLIED MATERIALS INC·Filed 2021·Granted Oct 1, 2024·0 cites·9 claims
- 2554US5453782AAutomatic exposure and gain control for low light level television cameraITT·Filed 1994·Granted Sep 26, 1995·11 cites·15 claims
- 2653US9589769B2Apparatus and method for efficient materials use during substrate processingVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2014·Granted Mar 7, 2017·0 cites·13 claims
- 2753US5350427AWafer retaining platen having peripheral clamp and wafer lifting meansVARIAN ASSOCIATES·Filed 1993·Granted Sep 27, 1994·23 cites·11 claims
- 2853US4744709ALow deflection force sensitive pickVARIAN ASSOCIATES·Filed 1987·Granted May 17, 1988·20 cites·10 claims
- 2952US4931776AFluid flow sensor with flexible vaneVARIAN ASSOCIATES·Filed 1988·Granted Jun 5, 1990·12 cites·4 claims
- 3045US2008169183A1Plasma Source with Liner for Reducing Metal ContaminationVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Application pending·0 cites
- 3143US10062548B2Gas injection system for ion beam deviceVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2015·Granted Aug 28, 2018·0 cites·10 claims
- 3240US2019272983A1Substrate halo arrangement for improved process uniformityVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2018·Application pending·0 cites
- 3339US9070730B2Method and apparatus for removing a vertically-oriented substrate from a cassetteFAIRHURST JOHN ROBERT·Filed 2011·Granted Jun 30, 2015·0 cites·16 claims
- 3437US2018122670A1Removable substrate plane structure ringVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2016·Application pending·0 cites
- 3533US9520264B2Method and apparatus for clamping and cooling a substrate for ion implantationKRAMPERT JEFFREY E·Filed 2012·Granted Dec 13, 2016·0 cites·15 claims
- 3633US4527846AZoom focus and deflection assembly for electron discharge devices of the camera tube typeITT·Filed 1982·Granted Jul 9, 1985·1 cites·23 claims
- 3733US2006258128A1Methods and apparatus for enabling multiple process steps on a single substrateNUNAN PETER·Filed 2006·Application pending·0 cites
- 3831US4602713AMultiple wafer holder for a wafer transfer systemVARIAN ASSOCIATES·Filed 1983·Granted Jul 29, 1986·3 cites·5 claims
Join the waitlist — get patent alerts
Get an alert when Richard J. Hertel files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →