Inventor · disambiguated record
Richard F. Hollman
Also filed as: HOLLMAN RICHARD F
5 granted patents·638 citations·filing 1990–1996
85Inventor score
Top patents by PatentIndex Score
5 records- 0195US5559338ADeep ultraviolet optical imaging system for microlithography and/or microfabricationEXCIMER LASER SYSTEMS INC·Filed 1994·Granted Sep 24, 1996·141 cites·19 claims
- 0292US5814156APhotoreactive surface cleaningUVTECH SYS INC·Filed 1996·Granted Sep 29, 1998·165 cites·34 claims
- 0391US5669979APhotoreactive surface processingUVTECH SYS INC·Filed 1996·Granted Sep 23, 1997·307 cites·16 claims
- 0469US5359388AMicrolithographic projection systemGEN SIGNAL CORP·Filed 1993·Granted Oct 25, 1994·23 cites·9 claims
- 0528US5070235AAccumulated exposure detection with exposure terminating attenuatorGEN SIGNAL CORP·Filed 1990·Granted Dec 3, 1991·2 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →