Inventor · disambiguated record
Richard S. Osugi
Also filed as: OSUGI RICHARD · OSUGI RICHARD S
3 granted patents·70 citations·filing 1997–1998
74Inventor score
Files withLSI LOGIC CORP3
Top patents by PatentIndex Score
3 records- 0165US6066266AIn-situ chemical-mechanical polishing slurry formulation for compensation of polish pad degradationLSI LOGIC CORP·Filed 1998·Granted May 23, 2000·32 cites·31 claims
- 0251US6114215AGenerating non-planar topology on the surface of planar and near-planar substratesLSI LOGIC CORP·Filed 1998·Granted Sep 5, 2000·19 cites·19 claims
- 0350US5863825AAlignment mark contrast enhancementLSI LOGIC CORP·Filed 1997·Granted Jan 26, 1999·19 cites·19 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →