Inventor · disambiguated record
Richard J. Rzeszut
Also filed as: RZESZUT RICHARD · RZESZUT RICHARD J
7 granted patents·42 citations·filing 2000–2020
81Inventor score
Top patents by PatentIndex Score
7 records- 0185US10087520B2Implantation using solid aluminum iodide (AlI3) for producing atomic aluminum ions and in situ cleaning of aluminum iodide and associated by-productsAXCELIS TECH INC·Filed 2017·Granted Oct 2, 2018·5 cites·20 claims
- 0282US6515290B1Bulk gas delivery system for ion implantersAXCELIS TECH INC·Filed 2000·Granted Feb 4, 2003·27 cites·21 claims
- 0379US10774419B2Implantation using solid aluminum iodide (ALI3) for producing atomic aluminum ions and in situ cleaning of aluminum iodide and associated by-productsAXCELIS TECH INC·Filed 2017·Granted Sep 15, 2020·3 cites·20 claims
- 0477US8270142B2De-clamping wafers from an electrostatic chuckLEE WILLIAM D·Filed 2008·Granted Sep 18, 2012·6 cites·18 claims
- 0572US10847339B2Hydrogen generator for an ion implanterAXCELIS TECH INC·Filed 2019·Granted Nov 24, 2020·1 cites·20 claims
- 0665US11276543B2Hydrogen generator for an ion implanterAXCELIS TECH INC·Filed 2020·Granted Mar 15, 2022·0 cites·20 claims
- 0753US8023247B2Electrostatic chuck with compliant coatAXCELIS TECH INC·Filed 2008·Granted Sep 20, 2011·0 cites·11 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →