Inventor · disambiguated record

Robert D. Broyles

Also filed as: BROYLES ROBERT D

2 granted patents·5 citations·filing 2002–2003

52Inventor score

Technology areasB01D

Files withLSI LOGIC CORP2

Top patents by PatentIndex Score

2 records

0149US6831022B1Method and apparatus for removing water vapor as a byproduct of chemical reaction in a wafer processing chamberLSI LOGIC CORP·Filed 2003·Granted Dec 14, 2004·3 cites·6 claims
0247US6630411B1Method and apparatus for removing water vapor as a byproduct of chemical reaction in a wafer processing chamberLSI LOGIC CORP·Filed 2002·Granted Oct 7, 2003·2 cites·6 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →