Inventor · disambiguated record
Robert M. Gutowski
Also filed as: GUTOWSKI ROBERT M
8 granted patents·100 citations·filing 1997–2001
87Inventor score
Technology areasH05G
Files withADVANCED ENERGY SYST8
Top patents by PatentIndex Score
8 records- 0169US6133577AMethod and apparatus for producing extreme ultra-violet light for use in photolithographyADVANCED ENERGY SYST·Filed 1997·Granted Oct 17, 2000·39 cites·45 claims
- 0257US6552350B2System and method for providing a lithographic light source for a semiconductor manufacturing processADVANCED ENERGY SYST·Filed 2001·Granted Apr 22, 2003·5 cites·27 claims
- 0355US6353232B2Holder assembly system and method in an emitted energy system for photolithographyADVANCED ENERGY SYST·Filed 2001·Granted Mar 5, 2002·5 cites·44 claims
- 0452US6180952B1Holder assembly system and method in an emitted energy system for photolithographyADVANCED ENERGY SYST·Filed 1998·Granted Jan 30, 2001·16 cites·39 claims
- 0549US6437349B1Fluid nozzle system and method in an emitted energy system for photolithographyADVANCED ENERGY SYST·Filed 2000·Granted Aug 20, 2002·2 cites·18 claims
- 0649US6190835B1System and method for providing a lithographic light source for a semiconductor manufacturing processADVANCED ENERGY SYST·Filed 1999·Granted Feb 20, 2001·12 cites·6 claims
- 0746US6105885AFluid nozzle system and method in an emitted energy system for photolithographyADVANCED ENERGY SYST·Filed 1998·Granted Aug 22, 2000·11 cites·13 claims
- 0842US6065203AMethod of manufacturing very small diameter deep passagesADVANCED ENERGY SYST·Filed 1998·Granted May 23, 2000·10 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →