Inventor · disambiguated record
Robert Lawrence Healton
Also filed as: HEALTON ROBERT L · HEALTON ROBERT LAWRENCE
4 granted patents·1 pending application·424 citations·filing 1993–2002
84Inventor score
Top patents by PatentIndex Score
5 records- 0194US6428713B1MEMS sensor structure and microfabrication process thereforDELPHI TECH INC·Filed 1999·Granted Aug 6, 2002·111 cites·10 claims
- 0294US5427975AMethod of micromachining an integrated sensor on the surface of a silicon waferDELCO ELECTRONICS CORP·Filed 1993·Granted Jun 27, 1995·180 cites·31 claims
- 0384US5531121AMicromachined integrated pressure sensor with oxide polysilicon cavity sealingDELCO ELECTRONICS CORP·Filed 1995·Granted Jul 2, 1996·67 cites·3 claims
- 0481US6750152B1Method and apparatus for electrically testing and characterizing formation of microelectric featuresDELPHI TECH INC·Filed 1999·Granted Jun 15, 2004·66 cites·16 claims
- 0539US2002125208A1MEMS sensor structure and microfabrication process thereforDELPHI TECH INC·Filed 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →