Inventor · disambiguated record
Robert B. Hixson
Also filed as: HIXSON ROBERT B
4 granted patents·50 citations·filing 2000–2002
77Inventor score
Top patents by PatentIndex Score
4 records- 0174US6780294B1Shield assembly for substrate processing chamberSET TOSOH·Filed 2002·Granted Aug 24, 2004·21 cites·10 claims
- 0272US6736946B2Physical vapor deposition apparatus with modified shutter disk and cover ringINTEGRATED DEVICE TECH·Filed 2002·Granted May 18, 2004·15 cites·7 claims
- 0359US6627543B1Low-temperature sputtering system and method for salicide processINTEGRATED DEVICE TECH·Filed 2000·Granted Sep 30, 2003·7 cites·7 claims
- 0459US6440879B1Physical vapor deposition apparatus with modified shutter disk and cover ringINTEGRATED DEVICE TECH·Filed 2001·Granted Aug 27, 2002·7 cites·5 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →