Inventor · disambiguated record
Roman Klein
Also filed as: KLEIN ROMAN
4 granted patents·37 citations·filing 2002–2017
73Inventor score
Top patents by PatentIndex Score
4 records- 0178US7172788B2Optical element and method for its manufacture as well as lithography apparatus and method for manufacturing a semiconductor deviceZEISS CARL SMT AG·Filed 2002·Granted Feb 6, 2007·19 cites·24 claims
- 0276US7060993B2Device, EUV-lithographic device and method for preventing and cleaning contamination on optical elementsZEISS CARL SMT AG·Filed 2003·Granted Jun 13, 2006·15 cites·21 claims
- 0373US7462842B2Device, EUV lithographic device and method for preventing and cleaning contamination on optical elementsZEISS CARL SMT AG·Filed 2006·Granted Dec 9, 2008·3 cites·5 claims
- 0439US10627336B2Optical measurement deviceHACH LANGE GMBH·Filed 2017·Granted Apr 21, 2020·0 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →