Inventor · disambiguated record
Robert J. Markunas
Also filed as: MARKUNAS ROBERT · MARKUNAS ROBERT J
14 granted patents·1,431 citations·filing 1987–2004
95Inventor score
Files withRES TRIANGLE INST6RES TRIANGLE INST INC2ZIPTRONIX2MARTIN MARIETTA ENERGY SYSTEMS1RESERACH TRIANGLE INST INC1
Top patents by PatentIndex Score
14 records- 0198US5180435ARemote plasma enhanced CVD method and apparatus for growing an epitaxial semiconductor layerRES TRIANGLE INST INC·Filed 1990·Granted Jan 19, 1993·611 cites·10 claims
- 0297US6822326B2Wafer bonding hermetic encapsulationZIPTRONIX·Filed 2002·Granted Nov 23, 2004·175 cites·39 claims
- 0396US5521360AApparatus and method for microwave processing of materialsMARTIN MARIETTA ENERGY SYSTEMS·Filed 1994·Granted May 28, 1996·243 cites·37 claims
- 0494US7622324B2Wafer bonding hermetic encapsulationZIPTRONIX·Filed 2004·Granted Nov 24, 2009·85 cites·95 claims
- 0591US5018479ARemote plasma enhanced CVD method and apparatus for growing an epitaxial semconductor layerRESERACH TRIANGLE INST INC·Filed 1989·Granted May 28, 1991·73 cites·14 claims
- 0691US4870030ARemote plasma enhanced CVD method for growing an epitaxial semiconductor layerRES TRIANGLE INST INC·Filed 1987·Granted Sep 26, 1989·90 cites·15 claims
- 0783US6552295B2Plasma furnace disposal of hazardous wastesRES TRIANGLE INST·Filed 2000·Granted Apr 22, 2003·61 cites·92 claims
- 0871US7112536B2Plasma processing system and methodRES TRIANGLE INST·Filed 2003·Granted Sep 26, 2006·7 cites·9 claims
- 0966US5418018AChemical vapor deposition of diamond films using water-based plasma dischargesRES TRIANGLE INST·Filed 1993·Granted May 23, 1995·26 cites·12 claims
- 1063US6558504B1Plasma processing system and methodRES TRIANGLE INST·Filed 1999·Granted May 6, 2003·13 cites·30 claims
- 1152US5908565ALine plasma vapor phase deposition apparatus and methodSHARP KK·Filed 1995·Granted Jun 1, 1999·19 cites·100 claims
- 1247US5168330ASemiconductor device having a semiconductor substrate interfaced to a dissimilar material by means of a single crystal pseudomorphic interlayerRES TRIANGLE INST·Filed 1990·Granted Dec 1, 1992·11 cites·5 claims
- 1344US5585292AMethod of fabricating a thin film transistorSHARP KABUSHIKI·Filed 1995·Granted Dec 17, 1996·9 cites·10 claims
- 1438US5480686AProcess and apparatus for chemical vapor deposition of diamond films using water-based plasma dischargesRES TRIANGLE INST·Filed 1993·Granted Jan 2, 1996·8 cites·46 claims
Join the waitlist — get patent alerts
Get an alert when Robert J. Markunas files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →