Inventor · disambiguated record
Robert T. Matthews
Also filed as: MATTHEWS ROBERT · MATTHEWS ROBERT T
32 granted patents·4,579 citations·filing 1985–1995
98Inventor score
Files withTEXAS INSTRUMENTS INC32
Top patents by PatentIndex Score
32 records- 0199US5453124AProgrammable multizone gas injector for single-wafer semiconductor processing equipmentTEXAS INSTRUMENTS INC·Filed 1994·Granted Sep 26, 1995·908 cites·4 claims
- 0299US4820377AMethod for cleanup processing chamber and vacuum process moduleTEXAS INSTRUMENTS INC·Filed 1987·Granted Apr 11, 1989·334 cites·52 claims
- 0398US5268989AMulti zone illuminator with embeded process control sensors and light interference elimination circuitTEXAS INSTRUMENTS INC·Filed 1992·Granted Dec 7, 1993·399 cites·20 claims
- 0498US4949671AProcessing apparatus and methodTEXAS INSTRUMENTS INC·Filed 1988·Granted Aug 21, 1990·372 cites·9 claims
- 0597US5464499AMulti-electrode plasma processing apparatusTEXAS INSTRUMENTS INC·Filed 1993·Granted Nov 7, 1995·297 cites·11 claims
- 0697US4886570AProcessing apparatus and methodTEXAS INSTRUMENTS INC·Filed 1988·Granted Dec 12, 1989·160 cites·40 claims
- 0796US4816098AApparatus for transferring workpiecesTEXAS INSTRUMENTS INC·Filed 1987·Granted Mar 28, 1989·185 cites·4 claims
- 0895US5138973AWafer processing apparatus having independently controllable energy sourcesTEXAS INSTRUMENTS INC·Filed 1988·Granted Aug 18, 1992·108 cites·14 claims
- 0995US4911103AProcessing apparatus and methodTEXAS INSTRUMENTS INC·Filed 1988·Granted Mar 27, 1990·167 cites·12 claims
- 1094US5286297AMulti-electrode plasma processing apparatusTEXAS INSTRUMENTS INC·Filed 1992·Granted Feb 15, 1994·96 cites·20 claims
- 1193US5580385AStructure and method for incorporating an inductively coupled plasma source in a plasma processing chamberTEXAS INSTRUMENTS INC·Filed 1994·Granted Dec 3, 1996·149 cites·28 claims
- 1293US4687542AVacuum processing systemTEXAS INSTRUMENTS INC·Filed 1985·Granted Aug 18, 1987·138 cites·42 claims
- 1392US5446825AHigh performance multi-zone illuminator module for semiconductor wafer processingTEXAS INSTRUMENTS INC·Filed 1993·Granted Aug 29, 1995·158 cites·19 claims
- 1492US5044871AIntegrated circuit processing systemTEXAS INSTRUMENTS INC·Filed 1988·Granted Sep 3, 1991·131 cites·9 claims
- 1591US5248636AProcessing method using both a remotely generated plasma and an in-situ plasma with UV irradiationTEXAS INSTRUMENTS INC·Filed 1992·Granted Sep 28, 1993·86 cites·1 claims
- 1691US4836905AProcessing apparatusTEXAS INSTRUMENTS INC·Filed 1987·Granted Jun 6, 1989·117 cites·12 claims
- 1788US4842686AWafer processing apparatus and methodTEXAS INSTRUMENTS INC·Filed 1987·Granted Jun 27, 1989·54 cites·63 claims
- 1888US4818327AWafer processing apparatusTEXAS INSTRUMENTS INC·Filed 1987·Granted Apr 4, 1989·77 cites·21 claims
- 1987US4822450AProcessing apparatus and methodTEXAS INSTRUMENTS INC·Filed 1988·Granted Apr 18, 1989·56 cites·30 claims
- 2083US4966519AIntegrated circuit processing systemTEXAS INSTRUMENTS INC·Filed 1987·Granted Oct 30, 1990·67 cites·46 claims
- 2182US5345534ASemiconductor wafer heater with infrared lamp module with light blocking meansTEXAS INSTRUMENTS INC·Filed 1993·Granted Sep 6, 1994·80 cites·10 claims
- 2281US4832777AProcessing apparatus and methodTEXAS INSTRUMENTS INC·Filed 1988·Granted May 23, 1989·53 cites·16 claims
- 2379US5591493AStructure and method for incorporating an inductively coupled plasma source in a plasma processing chamberTEXAS INSTRUMENTS INC·Filed 1995·Granted Jan 7, 1997·49 cites·7 claims
- 2479US4875989AWafer processing apparatusTEXAS INSTRUMENTS INC·Filed 1988·Granted Oct 24, 1989·57 cites·18 claims
- 2578US4872938AProcessing apparatusTEXAS INSTRUMENTS INC·Filed 1988·Granted Oct 10, 1989·51 cites·4 claims
- 2676US5653838AGlass heating and sealing systemTEXAS INSTRUMENTS INC·Filed 1995·Granted Aug 5, 1997·25 cites·13 claims
- 2773US5367606AMulti-zone illuminator with embedded process control sensorsTEXAS INSTRUMENTS INC·Filed 1993·Granted Nov 22, 1994·45 cites·1 claims
- 2872US4832778AProcessing apparatus for wafersTEXAS INSTRUMENTS INC·Filed 1988·Granted May 23, 1989·39 cites·14 claims
- 2972US4816116ASemiconductor wafer transfer method and arm mechanismTEXAS INSTRUMENTS INC·Filed 1987·Granted Mar 28, 1989·38 cites·18 claims
- 3071US4830700AProcessing apparatus and methodTEXAS INSTRUMENTS INC·Filed 1988·Granted May 16, 1989·37 cites·10 claims
- 3165US4832779AProcessing apparatusTEXAS INSTRUMENTS INC·Filed 1988·Granted May 23, 1989·31 cites·10 claims
- 3247US4943457AVacuum slice carrierTEXAS INSTRUMENTS INC·Filed 1987·Granted Jul 24, 1990·15 cites·7 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →