Inventor · disambiguated record
Robert Meagley
Also filed as: MEAGLEY ROBERT M · MEAGLEY ROBERT P
1 granted patent·3 pending applications·2 citations·filing 2003–2004
19Inventor score
Files withINTEL CORP1
Top patents by PatentIndex Score
4 records- 0145US7391501B2Immersion liquids with siloxane polymer for immersion lithographyINTEL CORP·Filed 2004·Granted Jun 24, 2008·2 cites·13 claims
- 0239US2004265734A1Photoresist performance through control of polymer characteristicsFiled 2003·Application pending·0 cites
- 0337US2005084807A1Reducing photoresist line edge roughness using chemically-assisted reflowFiled 2003·Application pending·0 cites
- 0435US2005058933A1Quantum efficient photoacid generators for photolithographic processesFiled 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →