Inventor · disambiguated record
Ron Nagahara
Also filed as: NAGAHARA RON · NAGAHARA RON J
6 granted patents·293 citations·filing 1997–2002
86Inventor score
Files withLSI LOGIC CORP6
Top patents by PatentIndex Score
6 records- 0190US5865666AApparatus and method for polish removing a precise amount of material from a waferLSI LOGIC CORP·Filed 1997·Granted Feb 2, 1999·105 cites·19 claims
- 0290US5816900AApparatus for polishing a substrate at radially varying polish ratesLSI LOGIC CORP·Filed 1997·Granted Oct 6, 1998·98 cites·21 claims
- 0385US6004193ADual purpose retaining ring and polishing pad conditionerLSI LOGIC CORP·Filed 1997·Granted Dec 21, 1999·70 cites·18 claims
- 0459US6727107B1Method of testing the processing of a semiconductor wafer on a CMP apparatusLSI LOGIC CORP·Filed 2001·Granted Apr 27, 2004·8 cites·20 claims
- 0557US6555475B1Arrangement and method for polishing a surface of a semiconductor waferLSI LOGIC CORP·Filed 2002·Granted Apr 29, 2003·6 cites·12 claims
- 0656US6439981B1Arrangement and method for polishing a surface of a semiconductor waferLSI LOGIC CORP·Filed 2000·Granted Aug 27, 2002·6 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →