Inventor · disambiguated record
Robert A. Poitras
Also filed as: POITRAS ROBERT A · POITRAS ROBERT ANDREW
2 granted patents·1 pending application·38 citations·filing 2002–2013
62Inventor score
Files withVARIAN SEMICONDUCTOR EQUIPMENT3
Top patents by PatentIndex Score
3 records- 0186US9108322B2Force sensing system for substrate lifting apparatusVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Granted Aug 18, 2015·9 cites·20 claims
- 0285US6690022B2Ion beam incidence angle and beam divergence monitorVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2002·Granted Feb 10, 2004·29 cites·28 claims
- 0333US2008073569A1Mask position detectionVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2006·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Robert A. Poitras files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →