Inventor · disambiguated record

Ruey Horng Lin

Also filed as: LIN RUEY HORNG

2 granted patents·18 citations·filing 1999–2001

58Inventor score

Technology areasH10P

Files withTAIWAN SEMICONDUCTOR MFG2

Top patents by PatentIndex Score

2 records

0160US6665168B2Electrostatic chuck apparatus and method for efficiently dechucking a substrate therefromTAIWAN SEMICONDUCTOR MFG·Filed 2001·Granted Dec 16, 2003·12 cites·8 claims
0231US6221203B1Apparatus and method for controlling temperature of a chamberTAIWAN SEMICONDUCTOR MFG·Filed 1999·Granted Apr 24, 2001·6 cites·20 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →