Inventor · disambiguated record
Ryoichi Kawaguchi
Also filed as: KAWAGUCHI RYOICHI
2 granted patents·2 pending applications·19 citations·filing 1997–2005
56Inventor score
Technology areasG03F
Files withNIKON CORP3
Top patents by PatentIndex Score
4 records- 0162US7366642B2Minimum force output control method for counter-mass with cableNIKON CORP·Filed 2005·Granted Apr 29, 2008·2 cites·30 claims
- 0249US5793052ADual stage following method and apparatusNIKON CORP·Filed 1997·Granted Aug 11, 1998·17 cites·9 claims
- 0339US2007097340A1Active damper with counter mass to compensate for structural vibrations of a lithographic systemNIKON CORP·Filed 2005·Application pending·0 cites
- 0436US2004128918A1Control system and method for improving tracking accuracy of a stage through processing of information from previous operationsFiled 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →