Inventor · disambiguated record
Sami K. Hahto
Also filed as: HAHTO SAMI K
18 granted patents·8 pending applications·143 citations·filing 2003–2025
93Inventor score
Top patents by PatentIndex Score
26 records- 0195US12112915B2Vaporizer, ion source and method for generating aluminum-containing vaporNISSIN ION EQUIPMENT CO LTD·Filed 2022·Granted Oct 8, 2024·2 cites·20 claims
- 0293US8110820B2Ion beam apparatus and method for ion implantationGLAVISH HILTON F·Filed 2007·Granted Feb 7, 2012·23 cites·50 claims
- 0393US7838850B2External cathode ion sourceSEMEQUIP INC·Filed 2008·Granted Nov 23, 2010·24 cites·14 claims
- 0489US8436326B2Ion beam apparatus and method employing magnetic scanningGLAVISH HILTON F·Filed 2010·Granted May 7, 2013·9 cites·5 claims
- 0588US7176469B2Negative ion source with external RF antennaUNIV CALIFORNIA·Filed 2003·Granted Feb 13, 2007·42 cites·12 claims
- 0686US7851773B2Ion beam apparatus and method employing magnetic scanningSEMIQUIP INC·Filed 2007·Granted Dec 14, 2010·13 cites·40 claims
- 0786US2025308833A1Ion source and ion implanter having ion sourceNISSIN ION EQUIPMENT CO LTD·Filed 2024·Application pending·0 cites
- 0885US7928406B2Method and system for extracting ion beams composed of molecular ions (cluster ion beam extraction system)SEMEQUIP INC·Filed 2008·Granted Apr 19, 2011·8 cites·9 claims
- 0984US2025266231A1Vaporizer, method, and ion source including vaporizerNISSIN ION EQUIPMENT CO LTD·Filed 2025·Application pending·0 cites
- 1083US8994272B2Ion source having at least one electron gun comprising a gas inlet and a plasma region defined by an anode and a ground element thereofNISSIN ION EQUIPMENT CO LTD·Filed 2013·Granted Mar 31, 2015·5 cites·23 claims
- 1182US9865422B2Plasma generator with at least one non-metallic componentNISSIN ION EQUIPMENT CO LTD·Filed 2015·Granted Jan 9, 2018·3 cites·9 claims
- 1282US2025071881A1Vaporizer, ion source and method for generating aluminum-containing vaporNISSIN ION EQUIPMENT CO LTD·Filed 2024·Application pending·0 cites
- 1381US9142386B2Ion beam lineNISSIN ION EQUIPMENT CO LTD·Filed 2013·Granted Sep 22, 2015·5 cites·44 claims
- 1477US9502213B2Ion beam lineNISSIN ION EQUIPMENT CO LTD·Filed 2015·Granted Nov 22, 2016·2 cites·20 claims
- 1575US12328807B2Vaporizer, ion source and method for generating aluminum-containing vaporNISSIN ION EQUIPMENT CO LTD·Filed 2022·Granted Jun 10, 2025·0 cites·20 claims
- 1670US11017974B2Ion sourceNISSIN ION EQUIPMENT CO LTD·Filed 2017·Granted May 25, 2021·1 cites·19 claims
- 1770US9734982B1Beam current density distribution adjustment device and ion implanterNISSIN ION EQUIPMENT CO LTD·Filed 2016·Granted Aug 15, 2017·1 cites·20 claims
- 1870US9275819B2Magnetic field sources for an ion sourceNISSIN ION EQUIPMENT CO LTD·Filed 2013·Granted Mar 1, 2016·2 cites·23 claims
- 1966US8330118B2Multi mode ion sourceHORSKY THOMAS N·Filed 2009·Granted Dec 11, 2012·1 cites·23 claims
- 2064US8502161B2External cathode ion sourceHAHTO SAMI K·Filed 2010·Granted Aug 6, 2013·2 cites·11 claims
- 2163US2025364205A1Ion sourceNISSIN ION EQUIPMENT CO LTD·Filed 2024·Application pending·0 cites
- 2262US2025273437A1Vaporizer and ion sourceNISSIN ION EQUIPMENT CO LTD·Filed 2024·Application pending·0 cites
- 2353US2010066252A1Spiral rf-induction antenna based ion source for neutron generatorsUNIV CALIFORNIA·Filed 2009·Application pending·0 cites
- 2446US2010025573A15 ns or less neutron and gamma pulse generatorUNIV CALIFORNIA·Filed 2007·Application pending·0 cites
- 2539US10153134B1Plasma generation systemNISSIN ION EQUIPMENT CO LTD·Filed 2018·Granted Dec 11, 2018·0 cites·22 claims
- 2638US2020294819A1Systems and Methods for Substrate CoolingNISSIN ION EQUIPMENT CO LTD·Filed 2019·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →