Inventor · disambiguated record
Sarah L. Lane
Also filed as: LANE SARAH L
8 granted patents·110 citations·filing 2002–2008
87Inventor score
Top patents by PatentIndex Score
8 records- 0189US7265437B2Low k dielectric CVD film formation process with in-situ imbedded nanolayers to improve mechanical propertiesSONY CORP·Filed 2005·Granted Sep 4, 2007·14 cites·16 claims
- 0288US6737747B2Advanced BEOL interconnect structures with low-k PE CVD cap layer and method thereofIBM·Filed 2002·Granted May 18, 2004·43 cites·13 claims
- 0386US7202564B2Advanced low dielectric constant organosilicon plasma chemical vapor deposition filmsIBM·Filed 2005·Granted Apr 10, 2007·11 cites·29 claims
- 0483US6939797B2Advanced BEOL interconnect structures with low-k PE CVD cap layer and method thereofIBM·Filed 2003·Granted Sep 6, 2005·26 cites·20 claims
- 0582US7585722B2Integrated circuit comb capacitorIBM·Filed 2006·Granted Sep 8, 2009·9 cites·22 claims
- 0678US7494938B2Advanced low dielectric constant organosilicon plasma chemical vapor deposition filmsIBM·Filed 2007·Granted Feb 24, 2009·5 cites·11 claims
- 0764US8120143B2Integrated circuit comb capacitorEDELSTEIN DANIEL C·Filed 2008·Granted Feb 21, 2012·2 cites·10 claims
- 0853US7998880B2Low k dielectric CVD film formation process with in-situ imbedded nanolayers to improve mechanical propertiesIBM·Filed 2007·Granted Aug 16, 2011·0 cites·11 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →