Inventor · disambiguated record
Sangmin Mun
Also filed as: MUN SANGMIN
0 granted patents·5 pending applications·0 citations·filing 2012–2023
Technology areasH10P
Top patents by PatentIndex Score
5 records- 0146US2023407177A1Etching gas composition, substrate processing apparatus, and pattern forming method using the etching gas compositionSEMES CO LTD·Filed 2023·Application pending·0 cites
- 0245US2023313039A1Etching gas composition, substrate processing apparatus, and pattern forming method using the sameSEMES CO LTD·Filed 2023·Application pending·0 cites
- 0331US2022208526A1Process chamber having a temperature measuring unit and apparatus for processing a substrate having a temperature measuring unitSEMES CO LTD·Filed 2021·Application pending·0 cites
- 0421US2018358211A1Substrate treating apparatusSEMES CO LTD·Filed 2018·Application pending·0 cites
- 0513US2012305191A1Apparatus for treating substrateMUN SANGMIN·Filed 2012·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Sangmin Mun files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →