Inventor · disambiguated record
Sae Won Na
Also filed as: NA SAE WON
1 granted patent·1 pending application·0 citations·filing 2020–2022
1Inventor score
Technology areasH10P
Files withSEMES CO LTD2
Top patents by PatentIndex Score
2 records- 0147US2023207266A1Substrate processing apparatus, harmonic control unit and harmonic control methodSEMES CO LTD·Filed 2022·Application pending·0 cites
- 0237US11658010B2Substrate support unit and substrate processing apparatus including the sameSEMES CO LTD·Filed 2020·Granted May 23, 2023·0 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →