Inventor · disambiguated record
Sangki Nam
Also filed as: NAM SANGKI
11 granted patents·17 pending applications·4 citations·filing 2020–2025
79Inventor score
Files withSAMSUNG ELECTRONICS CO LTD28
Top patents by PatentIndex Score
28 records- 0193US11195696B2Electron beam generator, plasma processing apparatus having the same and plasma processing method using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted Dec 7, 2021·4 cites·17 claims
- 0271US2024038510A1Methods of processing substrates and apparatuses thereofSAMSUNG ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
- 0367US11869751B2Upper electrode and substrate processing apparatus including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2022·Granted Jan 9, 2024·0 cites·20 claims
- 0467US2025140536A1Methods of processing substrates and apparatuses thereofSAMSUNG ELECTRONICS CO LTD·Filed 2025·Application pending·0 cites
- 0565US11545344B2Upper electrode and substrate processing apparatus including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted Jan 3, 2023·0 cites·19 claims
- 0664US2025218718A1Contamination prevention device for extreme ultra-violet (euv) reticle and euv exposure apparatus including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 0762US12087550B2Device for measuring density of plasma, plasma processing system, and semiconductor device manufacturing method using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2022·Granted Sep 10, 2024·0 cites·19 claims
- 0862US2022139714A1Methods of processing substrates and apparatuses thereofSAMSUNG ELECTRONICS CO LTD·Filed 2021·Application pending·0 cites
- 0960US11996275B2Device for radical diagnostic in plasma processing chamber, radical diagnostic system having the same, and operating method thereofSAMSUNG ELECTRONICS CO LTD·Filed 2022·Granted May 28, 2024·0 cites·18 claims
- 1060US2025191804A1Neutral beam and extreme ultraviolet light-generating device and methodSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 1159US2025014871A1Semiconductor processing apparatus using plasmaSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 1257US2024128055A1Apparatus for processing plasma and method of processing plasma and manufacturing semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
- 1357US2024192604A1Post baking apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
- 1456US2025201541A1Arcing detection sensor and plasma treating apparatus including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 1554US12512298B2Plasma processing deviceSAMSUNG ELECTRONICS CO LTD·Filed 2022·Granted Dec 30, 2025·0 cites·18 claims
- 1654US12431341B2Apparatus for arcing diagnosis, plasma process equipment including the same, and arcing diagnosis methodSAMSUNG ELECTRONICS CO LTD·Filed 2022·Granted Sep 30, 2025·0 cites·20 claims
- 1754US12183555B2Substrate processing apparatus and method of manufacturing semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2022·Granted Dec 31, 2024·0 cites·20 claims
- 1854US2024212992A1Plasma processing apparatus and methodSAMSUNG ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
- 1954US2023317418A1Substrate processing apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2022·Application pending·0 cites
- 2053US2025087509A1Semiconductor process device and method of monitoring semiconductor processSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 2152US2024274418A1Plasma density measurement sensor, apparatus for measuring real-time plasma density having the same, and operating method thereofSAMSUNG ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
- 2251US2024274419A1Plasma monitoring system and method of monitoring plasmaSAMSUNG ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
- 2350US11705306B2Variable frequency and non-sinusoidal power generator using double side cooling, plasma processing apparatus including the same and method of manufacturing semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted Jul 18, 2023·0 cites·20 claims
- 2450US2024147698A1Semiconductor device and method of manufactureSAMSUNG ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
- 2549US12125687B2System of semiconductor process and control method thereofSAMSUNG ELECTRONICS CO LTD·Filed 2022·Granted Oct 22, 2024·0 cites·19 claims
- 2646US2021384012A1Substrate processing apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2021·Application pending·0 cites
- 2746US2024047247A1Semiconductor process deviceSAMSUNG ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
- 2843US11940620B2Method of cleaning collector of EUV light source systemSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted Mar 26, 2024·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →