Inventor · disambiguated record
Sangyeon Oh
Also filed as: OH SANGYEON
1 granted patent·5 pending applications·0 citations·filing 2020–2024
2Inventor score
Files withSAMSUNG ELECTRONICS CO LTD6
Top patents by PatentIndex Score
6 records- 0159US2025171901A1Electrostatic chuck apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 0255US2024152058A1Immersion lithographic systemSAMSUNG ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
- 0355US2024318314A1Substrate support deviceSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 0452US2024321619A1Substrate supporterSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 0552US2024167162A1Substrate stage and substrate processing apparatus including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
- 0634US11688623B2Wafer inspection apparatusesSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted Jun 27, 2023·0 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →