Inventor · disambiguated record
Satoru Oishi
Also filed as: OISHI SATORU
33 granted patents·14 pending applications·738 citations·filing 1996–2016
97Inventor score
Top patents by PatentIndex Score
47 records- 0199US6196715B1X-ray diagnostic system preferable to two dimensional x-ray detectionTOSHIBA KK·Filed 1998·Granted Mar 6, 2001·423 cites·23 claims
- 0293US7173716B2Alignment apparatus, exposure apparatus using the same, and method of manufacturing devicesCANON KK·Filed 2005·Granted Feb 6, 2007·15 cites·16 claims
- 0392US7148973B2Position detecting method and apparatus, exposure apparatus and device manufacturing methodCANON KK·Filed 2005·Granted Dec 12, 2006·12 cites·12 claims
- 0488US6992780B2Position detecting method and apparatus, exposure apparatus and device manufacturing methodCANON KK·Filed 2002·Granted Jan 31, 2006·26 cites·14 claims
- 0587US7385700B2Management system, apparatus, and method, exposure apparatus, and control method thereforCANON KK·Filed 2005·Granted Jun 10, 2008·8 cites·20 claims
- 0685US6992767B2Management system, apparatus, and method, exposure apparatus, and control method thereforCANON KK·Filed 2003·Granted Jan 31, 2006·21 cites·29 claims
- 0784US7247868B2Position detection method and apparatusCANON KK·Filed 2005·Granted Jul 24, 2007·6 cites·5 claims
- 0882US6412978B1X-ray diagnostic apparatusTOSHIBA KK·Filed 2000·Granted Jul 2, 2002·139 cites·18 claims
- 0980US7443493B2Transfer characteristic calculation apparatus, transfer characteristic calculation method, and exposure apparatusCANON KK·Filed 2007·Granted Oct 28, 2008·5 cites·7 claims
- 1079US6785583B2Management system and apparatus, method therefor, and device manufacturing methodCANON KK·Filed 2003·Granted Aug 31, 2004·19 cites·28 claims
- 1175US10420461B2Image generating apparatus, image generating method, and storage mediumCANON KK·Filed 2016·Granted Sep 24, 2019·2 cites·18 claims
- 1271US7110116B2Alignment apparatus, exposure apparatus using same, and method of manufacturing devicesCANON KK·Filed 2002·Granted Sep 19, 2006·9 cites·6 claims
- 1367US7313873B2Surface position measuring method, exposure apparatus, and device manufacturing methodCANON KK·Filed 2006·Granted Jan 1, 2008·2 cites·3 claims
- 1466US7952725B2Surface shape measurement apparatus and exposure apparatusCANON KK·Filed 2009·Granted May 31, 2011·2 cites·8 claims
- 1565US7075618B2Apparatus control system, apparatus control method, semiconductor exposure apparatus, semiconductor exposure apparatus control method and semiconductor device manufacturing methodCANON KK·Filed 2002·Granted Jul 11, 2006·9 cites·21 claims
- 1663US7035759B2Position detecting method and apparatusCANON KK·Filed 2003·Granted Apr 25, 2006·5 cites·1 claims
- 1762US7710543B2Scanning exposure apparatus and device manufacturing methodCANON KK·Filed 2007·Granted May 4, 2010·1 cites·12 claims
- 1862US7069104B2Management system, management apparatus, management method, and device manufacturing methodCANON KK·Filed 2003·Granted Jun 27, 2006·7 cites·12 claims
- 1959US7067826B2Position detection method and apparatusCANON KK·Filed 2002·Granted Jun 27, 2006·4 cites·15 claims
- 2057US7865328B2Position detecting method and apparatusCANON KK·Filed 2007·Granted Jan 4, 2011·0 cites·4 claims
- 2155US8089612B2Position detection apparatus, position detection method, exposure apparatus, and device fabrication methodMATSUMOTO TAKAHIRO·Filed 2009·Granted Jan 3, 2012·2 cites·10 claims
- 2254US7373213B2Management system and apparatus, method therefor, and device manufacturing methodCANON KK·Filed 2004·Granted May 13, 2008·3 cites·10 claims
- 2354US7352891B2Position detecting methodCANON KK·Filed 2004·Granted Apr 1, 2008·4 cites·10 claims
- 2454US6914666B2Method and system for optimizing parameter value in exposure apparatus and exposure apparatus and methodCANON KK·Filed 2003·Granted Jul 5, 2005·3 cites·18 claims
- 2551US2009220872A1Detecting apparatus, exposure apparatus, and device manufacturing methodCANON KK·Filed 2009·Application pending·0 cites
- 2650US7983472B2Position detecting methodCANON KK·Filed 2005·Granted Jul 19, 2011·0 cites·1 claims
- 2749US7010380B2Management system, management method and apparatus, and management apparatus control methodCANON KK·Filed 2003·Granted Mar 7, 2006·2 cites·16 claims
- 2848US2015144807A1Drawing data creating method, drawing apparatus, drawing method, and article manufacturing methodCANON KK·Filed 2014·Application pending·0 cites
- 2948US2006106566A1Position detecting method and apparatusOISHI SATORU·Filed 2005·Application pending·0 cites
- 3048US2006195215A1Management system, management apparatus, management method, and device manufacturing methodCANON KK·Filed 2006·Application pending·0 cites
- 3148US2015155137A1Method for measuring inclination of beam, drawing method, drawing apparatus, and method of manufacturing objectCANON KK·Filed 2014·Application pending·0 cites
- 3247US8532366B2Position detecting methodOISHI SATORU·Filed 2011·Granted Sep 10, 2013·0 cites·13 claims
- 3347US2013216954A1Drawing apparatus, and method of manufacturing articleCANON KK·Filed 2013·Application pending·0 cites
- 3446US8976337B2Method of measuring mark position and measuring apparatusOISHI SATORU·Filed 2011·Granted Mar 10, 2015·0 cites·12 claims
- 3545US8097473B2Alignment method, exposure method, pattern forming method, and exposure apparatusOISHI SATORU·Filed 2008·Granted Jan 17, 2012·0 cites·17 claims
- 3645US5910843APositioning apparatus and method thereof, and exposure apparatusCANON KK·Filed 1996·Granted Jun 8, 1999·9 cites·15 claims
- 3745US2014209818A1Lithography apparatus, lithography method, and method of manufacturing articleCANON KK·Filed 2014·Application pending·0 cites
- 3845US2015011026A1Processing method, processing apparatus, lithography apparatus, and method of manufacturing articleCANON KK·Filed 2014·Application pending·0 cites
- 3944US9606460B2Lithography apparatus, and method of manufacturing articleCANON KK·Filed 2015·Granted Mar 28, 2017·0 cites·15 claims
- 4044US7916271B2Apparatus and method for specifying correlation, exposure apparatus, and device manufacturing methodCANON KK·Filed 2006·Granted Mar 29, 2011·0 cites·11 claims
- 4144US2013230805A1Drawing apparatus, reference member, and method of manufacturing articleCANON KK·Filed 2013·Application pending·0 cites
- 4244US2014320836A1Lithography apparatus, lithography method, and method for manufacturing deviceCANON KK·Filed 2014·Application pending·0 cites
- 4342US2010192091A1Image processing method, program thereof, and image processing apparatusSEIKO EPSON CORP·Filed 2010·Application pending·0 cites
- 4440US9001387B2Drawing apparatus, data processing method, and method of manufacturing article that transform partially overlapping regions using different transformation rulesCANON KK·Filed 2013·Granted Apr 7, 2015·0 cites·10 claims
- 4536US2016124322A1Lithography apparatus, lithography method, and article manufacturing methodCANON KK·Filed 2015·Application pending·0 cites
- 4634US2015325404A1Lithography apparatus and method, and method of manufacturing an articleCANON KK·Filed 2015·Application pending·0 cites
- 4734US2015364291A1Lithography apparatus, and method of manufacturing articleCANON KK·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →