Inventor · disambiguated record
Sadayasu Suyama
Also filed as: SUYAMA SADAYASU
1 granted patent·1 pending application·5 citations·filing 2011–2022
25Inventor score
Technology areasH10P
Top patents by PatentIndex Score
2 records- 0174US9028621B2Substrate cleaning method and substrate cleaning deviceMIYAGI TADASHI·Filed 2011·Granted May 12, 2015·5 cites·6 claims
- 0251US2023295837A1Method of processing substrate, method of manufacturing semiconductor device, recording medium, and substrate processing apparatusKOKUSAI ELECTRIC CORP·Filed 2022·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →