Inventor · disambiguated record

Sakiko Yasuhara

Also filed as: YASUHARA SAKIKO

1 granted patent·153 citations·filing 2001–2001

55Inventor score

Technology areasC07F

Files withKABUSHIKIKAISHA KOJUNDOKAGAKU1

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1 record

0193US6593484B2Tantalum tertiary amylimido tris (dimethylamide), a process for producing the same, a solution of starting material for mocvd using the same, and a method of forming a tantalum nitride film using the sameKABUSHIKIKAISHA KOJUNDOKAGAKU·Filed 2001·Granted Jul 15, 2003·153 cites·4 claims

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