Inventor · disambiguated record
Sang-Yong Yu
Also filed as: YU SANG YONG
3 granted patents·6 pending applications·3 citations·filing 2005–2024
52Inventor score
Top patents by PatentIndex Score
9 records- 0159US2024264522A1Mask case, mask handling automation apparatus and operating method thereofSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 0257US7369254B2System and method for measuring dimension of patterns formed on photomaskSAMSUNG ELECTRONICS CO LTD·Filed 2005·Granted May 6, 2008·3 cites·17 claims
- 0354US9229327B2Electron beam exposure apparatus and method of detecting error using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2014·Granted Jan 5, 2016·0 cites·10 claims
- 0439US2008115806A1Photomask cleaning apparatus and cleaning methods using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2007·Application pending·0 cites
- 0537US2011247186A1Method of manufacturing multilayer ceramic capacitorSAMSUNG ELECTRO MECH·Filed 2010·Application pending·0 cites
- 0635US2014061448A1Multi-channel luminous energy sensing unit, apparatus for measuring light energy of exposure device and method for measuring light energy by channelSAMSUNG ELECTRO MECH·Filed 2013·Application pending·0 cites
- 0733US2017059414A1Infrared detector and temperature sensor including the sameSAMSUNG ELECTRO MECH·Filed 2016·Application pending·0 cites
- 0826US2013050690A1Calibration device for light measuring equipmentYU SANG YONG·Filed 2012·Application pending·0 cites
- 0922US8304173B2Photomasks, methods of exposing a substrate to light, methods of forming a pattern, and methods of manufacturing a semiconductor deviceYU SANG-YONG·Filed 2010·Granted Nov 6, 2012·0 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →