Inventor · disambiguated record
Scott R. Cline
Also filed as: CLINE SCOTT R
6 granted patents·101 citations·filing 1999–2002
83Inventor score
Top patents by PatentIndex Score
6 records- 0187US6186873B1Wafer edge cleaningIBM·Filed 2000·Granted Feb 13, 2001·49 cites·14 claims
- 0267US6273797B1In-situ automated CMP wedge conditionerIBM·Filed 1999·Granted Aug 14, 2001·28 cites·13 claims
- 0363US6899784B1Apparatus for detecting CMP endpoint in acidic slurriesECOPHYSICS AG·Filed 2002·Granted May 31, 2005·13 cites·8 claims
- 0462US6878629B1Method for detecting CMP endpoint in acidic slurriesIBM·Filed 2002·Granted Apr 12, 2005·8 cites·13 claims
- 0541US6500272B2System for and method of purging/venting a brush arm bearingIBM·Filed 2001·Granted Dec 31, 2002·1 cites·19 claims
- 0628US6247368B1CMP wet application wafer sensorIBM·Filed 1999·Granted Jun 19, 2001·2 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →