Inventor · disambiguated record
Scott E Galica
Also filed as: GALICA SCOTT · GALICA SCOTT E · GALICA SCOTT EDWIN
1 granted patent·2 pending applications·0 citations·filing 2021–2025
9Inventor score
Files withAXCELIS TECH INC3
Top patents by PatentIndex Score
3 records- 0158US2025379023A1Granular sputter source target with repeller cup and method for use thereofAXCELIS TECH INC·Filed 2025·Application pending·0 cites
- 0251US11887808B2Hybrid high-temperature electrostatic clamp for improved workpiece temperature uniformityAXCELIS TECH INC·Filed 2021·Granted Jan 30, 2024·0 cites·29 claims
- 0345US2025226266A1In-situ, pre-implant wafer characterization system and methodAXCELIS TECH INC·Filed 2024·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →